VCA

operating pressure differential MPa Orifice size mm Note 1) Effective area mm (Cv factor) Weight kg Max. operating pressure MPa Class Model Port size 1.0 6 (0.33) 3 2 0.21 1.0 1/4 ( 8A) 0.15 15 (0.83) 5 VCA (for air) 2 port solenoid valve 1.0 10 (0.55) 4 1/4 ( 8A) 3/8 (10A) 0.30 1.0 3 0.15 27 (1.5) 7 1.0 15 (0.83) 5 3/8 (10A) 1/2 (15A) 3/4 (20A) 1.0 0.50 4 0.3 27 (1.5) 7 0.15 10 38 (2.11

Flow Control Equipment

AS42l1FE AS43l1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tube O.D.

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 15 20 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

Series IDG

Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1

Air Pilot Operated Series NVSA

0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'

Process Pump <Fluororesin Type> Series PA3000

Discharge pressure (MPa) SUP = 0.5MPa 0.4 0.4 0.3 SUP = 0.5MPa SUP = 0.5MPa 0.4MPa 0.3 0.3 0.4MPa 0.4MPa 0.2 0.3MPa 0.2 0.2 0.3MPa 0.3MPa 0.1 0.1 0.1 0.2MPa 0.2MPa 0.2MPa 00 5 10 15 00 5 10 15 00 5 10 15 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PAP3313-T13: Flow rate characteristics (10Hz)* PAP3313-T13: Air consumption PAP3310-T13: Air consumption 200 15 Air consumption (l/min

Refrigerated Air Dryer

Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72 94 112 E 26 42 60 D 67 83 101 B C 36 52 70 A MHL2-10D MHL2-10D1 MHL2-10D2 11221122112296 124 162 38 54 72 MHL2-16D 1122A B C +0.025 3H9 0 depth 3 D 2 x M5 x 0.8 thread depth 7 (Mounting thread) 10 2 x 5.5 through (Hole for

AN

Model (Screw-in connection) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions

MRHQ

D20Sizes 10 and 16 updated!

SL5200

0.10 15 0.10 10 0.07 10 0.07 5 0.03 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 Flow rate (slpm, N2) 0 40 80 120 160 200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.

Air cylinder (Series compatible with secondary batteries)

55 60 D-M9V-900 1 D-M9WV-900 55 30 (n 4 65 30 (n 4 60 30 (n 4 70 30 (n 4 10 30 (n n=(4,8,12,16) n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) 15 Auto switch Connection and Example 16 3.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

VP4

VS4040-S-03 VS4040-S-04 DXT131-15P-06 DXT131-15P-10 DXT132-15-2P-12 DXT132-15-2P-14 XT021-9 DXT132-16 M6 x 25 with washer M8 x 35 3 8 1 2 3 4 VP450 Aluminum alloy Sub-plate !0 1 1 VP470 1 1 4 1 2 VP450 VP470 VP450 VP470 in part numbers are the same symbol for the thread type in How to Order. Gasket !1 Hexagon socket head screw VT3112-00G !2 Thread for mounting valve.

Shock Absorbers and Rate Controls

DA50x2 2.00 0.56 7.59 9,98 .578 L25 1.125 ,10 t.l3 .56 2 DA50x4 2.00 0.56 9_59 |.98 .578 2.25 t.50 t.t25 .56 t.l3 4 DA50r6 ?.00 0.56 I1.59 13.98 .5i8 ?.15 1.50 .17.5 .56 l.l .56 6 DA50xE 2.00 0.56 13.59 15.98 .578 2.25 1.50 t.l?

Rotary Gripper Series MRHQ

MRHQ10D MRHQ10D 20 20 Gripping force N Gripping force N 15 15 Pressure 0.6MPa Pressure 0.6MPa 0.5MPa 0.5MPa 10 10 0.4MPa 0.3MPa 0.4MPa 0.3MPa 5 5 0.2MPa 0.2MPa 0 10 20 30 40 50 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm F F MRHQ16D MRHQ16D 50 50 External gripping Pressure 0.6MPa Pressure 0.6MPa 40 40 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 30 0.4MPa 0.3MPa 0.4MPa

RLQ

For detailed specifications, refer to page 9-15-1.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

30 20 Transfer load m (kg) 300 L2 200 Mer m 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 500 a = 1000 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 92 Standard Motor/Horizontal Mount Specification Series LJ1S30 Dimensions/LJ1S303SC Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5

10-cy3r-e

Note 3) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 63: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding sections GR-S-010 (10 g) for tubing interior Grease pack part no. for 15 to 63: GR-S-010 (10 g) 112

3 Position Cylinder Series RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy