Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Series PF2W Digital Flow Switch For Water

PF2W704 Model PF2W740 PF2W711 Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit Water 1.7 to 17.0 L/min 0.35 to 4.5 L/min 3.5 to 45 L/min 7 to 110 L/min 1.7 to 17.0 L/min 0.35 to 4.5 L/min 3.5 to 45 L/min 7 to 110 L/min 2 to 16 L/min 0.5 to 4 L/min 5 to 40 L/min 10 to 100 L/min 0.1 L/min 0.05 L/min 0.5 L/min 1 L/min 0.1 L/pulse 0.05 L/pulse

CLQ

CLQ 157 245 402 629 982 1559 2513 3927 M5 x 0.8 Rc 1/8 Rc 1/4 MLGP Symbol Specifications Equivalent to 0.5 MPa -XA Change of rod end shape RLQ Standard Stroke MLU Bore size (mm) Standard stroke (mm) 20, 25 32, 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 ML1C DManufacture of Intermediate Stroke -X Description Part no.

•

'13'16 10 .

CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V

Compact Cylinder with Lock Series CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V

HRX-OM-X071

Fig 9-15 Required facility water flow (HRR050-W-20-) 9.7.2 HRR050-W-4030 Facility water flow rate [L/min] 25 20 15 10 5 0 0 5 10 15 20 25 30 35 40 45 Facility water inlet temperature [] The amount of the facilitywater for the opution with rated circulating fluid, cooling capacity which is described in fig.9-10.

CLA

. -750 20750 37 40 11 6 140 V, V. 92 30 52 " 124 21 31 76 25 19 M 1 2x1.75 11 58 131 M26X l .S (mm) XfUS H Z ZZ eo , h X Z ZZ Bore size MM N P PG PH PL PW RR S U W eCD Kl0 CX WtthOut boot With boot 40 VIS 20 27 Yo 42 11 20 45 10 153 16 8 1O'g , o~e 15e8 1 51 234 244 43 11.2 59 242 252 50 30 0/0 46 10 21 50 12 168 19 0 10. 0 18:~ a 58 261 273 52 11.2 66 269 281 83 % -16 31 % 48.5 13 23 60

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

Stability of suction position,

Specifications Buffer specification Pad diameter Mounting Tightening torque [Nm] Stroke [mm] Spring reactive force [N] At 0 stroke At full stroke 10 5 6.5 30 5 8.5 32 to 50 M18 x 1.5 28 to 32 50 5 10.5 Rotating 10 10 11.5 63 to 125 M22 x 1.5 45 to 50 30 10 13.5 50 10 15.5 Pad diameter 32, 40 Dimensions/With Ball Joint Buffer: Vacuum Inlet Lateral Pad form Flat type with groove ZP3E-YF32UMJBL

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37 P S H2 H1 Bore size MM K 8 6 6 5 N I ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 45 181 159 146 146 7 200 to 1000 150 to 1000 150 to 700 150 to 700 M14 x 1.5 M10 x 1.25

HRX-OM-X084

/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR010-A-10/20. 9-6 9.2.2 HRR010-W-10/20. 9-7 9.3 Flow Chart . 9-8 9.3.1 HRR010-A-10/20. 9-8 9.3.2 HRR010-W-10/20. 9-8 HRR Series HRX-OM-X084 Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-

Microspeed Cylinder

Example) For 10-CQ2XB40-57D, a 18mm width spacer is installed in a standard stroke 10-CQ2XB40-75D cylinder. 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Refer to "How to Order" on page 7 for auto switch model numbers.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

PF2W740 PF2W711 Model Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit Water 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 2 to 16 l/min 0.5 to 4 l/min 5 to 40 l/min 10 to 100 l/min 0.1 l/min 0.05 l/min 0.5 l/min 1 l/min 0.1 l/pulse 0.05 l/pulse 0.5 l/pulse

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

reduces flow setting time

-10 10 15.9 26.7 37.9 35.7 15.6 57 AS321FS-G02-12 12 18.5 29.7 40.9 34.5 17 59 AS321FS-G03-06 6 1/4 21 16.6 45 AS321FS-G03-08 8 13.2 22.7 33.9 14.2 46 AS321FS-G03-10 10 15.9 26.7 37.9 28 15.6 47 AS321FS-G03-12 12 18.5 29.7 40.9 26.8 17 49 AS421FS-G04-10 10 1/2 27 15.9 18.8 27.4 41.8 36.2 64.1 62.5 55.1 53.5 15.6 26 29 10 19 80 AS421FS-G04-12 12 18.5 30.8 45.2 35.1 17 82 AS421FS-G04-16 16

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials