Table of Contents

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.075 0.062 0.062 0.079 0.084 0.081 0.084 0.024 0.047 0.024 0.024 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3

ZP

Form w 1 Material e Vacuum inlet r Width across flats K Connection thread 10 13 A5 67 46 29.9 21 2.5 M5 x 0.8 21 8 4 10 8 M5 x 0.8 16 67.5 46.5 30.4 21.5 10 13 A Q 72 46 29.9 21 2.5 10 8 M5 x 0.8 16 72.5 46.5 30.4 21.5 20 25 83.5 57.6 39.8 29 3.5 25.9 12 12 M8 x 1.25 32 84 58.1 40.3 29.5 40 86.5 60.6 42.8 32 4 50 87.5 61.6 43.8 33 20 25 A8 26 D C B N S U F GN GS M A6 M6 x 1 8 4 04 06 08 ZP

Air Slide Table

M5 x 0.8 4.4 4 9 MXQ12B M6 x 1 7.4 7 12 MXQ16B M6 x 1 7.4 10 15 MXQ20B M8 x 1.25 18 14 20 MXQ8C M4 x 0.7 2.1 6 9 MXQ12C M5 x 0.8 4.4 8 12 3.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-S41-M5 Type 10-SS5YJ3-S41-C4 Type 10-SS5YJ3-46-M5 Type 10-SS5YJ3-46-C4 1/8 M5 x 0.8 10-SYJ343 Type 10-SS5YJ3-S46-M5 Type 10-SS5YJ3-S46-C4 Note) The values are for individually operated 2 position type manifold bases.

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

ZP

to 16 Pad diameter Vertical Dimensions/With Adapter: Vacuum Inlet Bellows Pad type Pad Unit ZP3-T10B;-A5 [Weight: 3.2 g] ZP3-T13B;-A5 [Weight: 3.4 g] ZP3-T16B;-A5 [Weight: 3.5 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 Vertical 3 10 2.5 3 3 10 2.5 With Adapter: Vacuum Inlet 10 2.5 15.5 15.5 15.5 Vertical Vertical With Buffer: Vacuum Inlet

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50°C, VALVE, SOL, 4/5 PORT SOLENOID VALVE, 34 lb

Table of Contents

) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10 25 13 25 14 0 0.043 0.004 0.012 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0 0.043 0.004 0.012 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions:

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions:

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10 25 13 25 14 0 0.043 0.004 0.012 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0 0.043 0.004 0.012 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions:

CRB2/CRBU2/CRB1

(13.5) 0.004 0.012 0 0.043 6 29 36 10 20 14 4.5 1.5 7 10 0.5 42 M5 M5 (10) 5.5 (16.5) M5 (18) 0.005 0.014 0 0.043 40 13 43 22 16 5 2 8 12 1.0 8 50 M5 10 Rotary Actuator Vane Type Series CRB2 Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

CQ2

40 10 2 10 12 12 5 M6 X 1.0 M5 X 0.8 15 5 M5 X 0.8 0 0.052 32 5.5 34 53.5 39.5 12.5 M8 X 1.25 21.5 49.5 4.5 60 45 14 2 14 13 16 7 14 21 10 to 50 RC(PT)1/8 Refer to p.2.3-18 for details rod end nut and optional bracket.

Vacuum Pad

to 16 Pad diameter Vertical Dimensions/With Adapter: Vacuum Inlet Bellows Pad type Pad Unit ZP3-T10B;-A5 [Weight: 3.2 g] ZP3-T13B;-A5 [Weight: 3.4 g] ZP3-T16B;-A5 [Weight: 3.5 g] Width across flat 10 Width across flat 10 Width across flat 10 M5 x 0.8 M5 x 0.8 M5 x 0.8 Vertical 3 10 2.5 3 3 10 2.5 With Adapter: Vacuum Inlet 10 2.5 15.5 15.5 15.5 Vertical Vertical With Buffer: Vacuum Inlet

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

CJ2

M5 x 0.8 Piping port M5 x 0.8 S + Stroke Z + Stroke Rod end nut Rod End Nut 2-LC Mounting hole Material: Iron Applicable bore (mm) 10 16 B H C d Part no.

15

x 0.8 10 70 50 3.5 22.5 78 M3 x 12 1.5 M5 x 22 3 14 17.7 NY M4 x 0.7 8 70 50 3.5 22.5 78 M3 x 12 3.6 M5 x 22 3 14 17.7 NX M5 x 0.8 10 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NW M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 9 11.7 NV M4 x 0.7 8 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NU M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 11 11.7 NT M5 x 0.8 10 70 50 3.5

Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum) - 0.7MPa (7.1kgf/cm 2 ) , Effective area (Cv factor): Standard type 0.9mm 2 (0.05); high flow type 1.5mm 2 (0.08) , Coil rated voltage: 12, 24VDC , Response time: ON: 4ms; OFF: 2ms , Ambient/fluid temp: -10 to 50°C, 4 PORT VALVE, 4/5 PORT SOLENOID VALVE, VVD, 34 lb