Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for dimensions.

NCA1

3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4

Air Cylinder NCA1 Series

7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16

3

VXS VXS 2) Shut off the power supply. 11. To control the fluid in the tank, connect the piping a little higher than the bottom of the tank. 3) Dismount the product. VXB 2. Low frequency operation Switch valves at least once every 30 days to prevent a malfunction. Also, in order to use it under the optimum state, conduct a regular inspection once a half year.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11

PSxx-OMG0001CN

DC1224 V DC1224 V 8 DC(+) DC(-) DC1224 V DC1224 V DC(+) 9 DC(-) / / 10 ( ) 11 / 5m / 12 2030 20 -28No.PS-OMG0001CN-H No.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

ASR

rotations Number of needle rotations Flow Valve: Series ASQ Meter-out Type (Inlet pressure: 0.3 MPa) ASQ430F ASQ530F ASQ630F 20 10 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 200 15 300 4 500 10 5 200 100 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle

Low Profile

2.45 1.5 2.3 (Lead wire AWG#26) 300 54 3.4 10 5 3 3 1.7 10 Base hole dimension w Mounting screw (Included) M2 x 11 2 x M2 x 0.4 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 (11.6) 4 4 2.1 1.7 1.7 3 2.45 Universal 0.8 4.9 10 2 (OUT) 1.5 2.3 1 (SUP) 3 (EXH) 3 3 1.7 3 (EXH) port 1 (SUP) port 2 (OUT) port Specific Product Precautions Be sure to read this before handling the

Low Differential Pressure Sensor

Tightening torque (Nm) 0.5 to 0.7 Nominal thread size M3 11 Digital Pressure Switch Precautions 2 Be sure to read before handling. Air Supply Selection Warning Warning 1. Use the switch within the operating fluid and ambient temperature range.

Hand Valve Series VH

132 300 223 151 150 48 25 4-Rc3/4, 1 3 (R) 40 3.6-11 Hand Valve Series VH Panel Mounted/Dimensions VH21l-02 VH31l-02 to 03 4 (B) 2 (A) 25 25 25 4 (B) SlA 1 (P) 3 (R) 1 (P) l74 l62 62 49 VlA 2 (A) 49 4-5.5 4-6.6 SlA VlA 62 134 97 VM/VR 125 94 VH 1.5 45 1.5 106 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-Rc 1/4, 3/8 12 4-Rc1/4 VH33l-02 to 03 (Bottom piping) 2 (A) 44 Panel

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Protocol: EtherCAT®, Mounting: DIN Rail Mounting, Cable Connector: w/o Plug Connector, Actuator: Ball Screw, Type: Basic Type, Body Size: 32, Motor Mounting: In-line, Lead: 16: 5mm; 25: 6mm; 32: 8mm; 40: 20mm, Stroke: 300mm

Protocol: EtherNet/IPâ„¢, Mounting: Screw Mounting, Cable Connector: w/o Plug Connector, Actuator: Ball Screw, Type: Basic Type, Body Size: 32, Motor Mounting: In-line, Lead: 16: 5mm; 25: 6mm; 32: 8mm; 40: 20mm, Stroke: 300mm

Protocol: EtherNet/IPâ„¢, Mounting: DIN Rail Mounting, Cable Connector: w/o Plug Connector, Actuator: Ball Screw, Type: Basic Type, Body Size: 32, Motor Mounting: In-line, Lead: 16: 5mm; 25: 6mm; 32: 8mm; 40: 20mm, Stroke: 300mm

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable),

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard Cable), Actuator