Transfer

15 EB 20 25 31 EC 6.5 8.5 9.5 ED 60 74 94 EY 53.5 67 81.5 FA 46.7 67.3 67.3 FB 33 43 43 FC 13 17 17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

AC Servo Motor Driver (SSCNET Type)

Axis No. settings . 12 5. Parameter list (Driver side) . 13 6.

IDX-OM-W035

V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 () 3 i-1-1 3 IDFB Series i-1 i-1 IDX-OM-W035 i i-2 5 . i-2-1 i-2 IDFB Series i-2 IDX-OM-W035 i i-2-2 i-2-3 50 i-2-4 i-2-5 0 i-2 IDFB Series i-3 IDX-OM-W035 i i-2-6 WARNING !

Steam Valve

50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 638 A

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area ASD230FM ASD330FM ASD430FM Model Flow direction symbols on body 8, 10 6 6, 8 Metric size 4, 6 Tube O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Meter-out type Meter-in type Inch size Flow rate l/min (ANR) 7 12 38 Controlled flow Symbol JIS symbol 0.1 0.6 0.2 Effective area mm Flow rate l/min (ANR) 175 350 295 75 Free flow 5.3 2.7 4.5 1.1 Effective

10

Load voltage Auto switch model Lead wire length [m]1 Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v Solid state auto switch 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

Rotary One-touch Fittings Series KS/KX

17 14 12.8 1 8 1 4 1 8 17 23 23 29 37 55 63 81 75 92 14 4 13.4 10.4 8 1 4 17 17 18.5 15.2 6 26.1 18.0 3 8 1 4 10 3 8 1 2 3 8 1 2 22 18.5 21 7 22 36.3 29.5 24 12 24 20.9 8 22 46.1 46.1 Reference dimensions after R(PT) thread installation.

VNB

LVH VNB1 VNB12 1 4 12 (P1) 12 (P1) LVD External pilot solenoid Valve Specifications LVQ Fluid Water/Oil/Air/Vacuum, etc. 5 to 60C (1) 2 (B) 1 (A) 2 (B) 1 (A) VNBA Fluid temperature LQ 5 to 99C (1) (Water, Oil etc.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

For Y terminal, it is up to 1.25 mm2 4. c Cable i outside diameter: 6 to 12 mm Note) For the one with the outside diameter ranged between 9 to 12 mm, remove the inside parts of the rubber seal u before using. u For obtaining the flow rate, refer to front t matter. y e o i o Magnifying figure Self-up screw 2 1 3 1316

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

LEC-T1_C

No.0 No.1 No.2 // SpeedSET MENU2 ESC TB Ver1.** / ///TB TB Ver2.** / ///TB 12 6.23 22 - (2) / TB Ver TB Ver.5.11 12 5.21 6.1 TB Ver2.1*LECPA 12 (2-1) LECPLECA INP ON ON INP OFF (2-1-a) TB Ver1.** TB Ver.5.11 Step data AX IS. Menu 1 Step data Parameter Test SET No. Step No.2 SET AX IS.

IDX-OM-V020

Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1 13.1 SAFETY INSTRUCTIONS FOR USE . 13-1 13.2 SPECIFICATIONS . 13-1 13.3 MAINTENANCE . 13-2 Chapter 14 Inspection record . 14-1 14.1 INSPECTION RECORD .

Nozzle Type Ionizer

No need to readjust the nozzle angle when the ionizer is restarted. eCartridge assembly p. 12 wBody assembly p. 12 Maintenance warning function Monitors emitter contamination or wear continuously and will turn on an LEDs and output signal.

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

PSE550/300

shift input 12 to 24 VDC (Gray) (Gray) + Main circuit OUT1 OUT1 12 to 24 VDC Load (Black) (Black) OUT2 OUT2 Load (White) (White) Load DC () DC () (Blue) (Blue) Descriptions Output (OUT2) display (Red) LCD Lights up when OUT2 is ON.

Dual Speed Controller with One-touch Fitting Series ASD 1

Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}

ASD

Symbol indication of flow direction on the body Meter-out Meter-in Air Flow/Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric 4, 6 6 8, 10 6, 8 1/4" 5/16" 3/8" 1/8" 5/32" 3/16" 1/4" Tube O.D. 1/4" 5/16" 3/8" 3/8" Inch 500 600 700 1200 1300 175 295 350 75 Air flow (l/min(ANR)) Controlled (free)/Flow 7.6 9.1 10.7 18.3 19.8 1.1 2.7 4.5 Eff

KS/KX

1 8 17 23 23 29 37 55 63 81 75 92 14 4 10.4 10.4 8 17 17 18.5 15.2 1 4 6 26.1 18.0 3 8 1 4 22 18.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 24 24 20.9 22 8 12 46.1 16.1 Reference dimensions after R(PT) thread installation.