Table of Contents

Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

Hydraulic

40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

ZP

-11-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

ZP

Form w 1 Material e Vacuum inlet 30 10 27 12.5 10 (Rotating angle) 8 10 2 13 16 27.5 13 10.5 10 to 32 B5 2 M5 x 0.8 5 20 25 32 15.5 12.5 9 12 3 32 32.5 16 13 20 25 B8 E N S U F GN GS Width across flats G 36 15.5 12.5 2 M8 x 1.25 8 12 12 3 32 36.5 16 13 40 39 18.5 12.5 2.5 19 5 50 40 19.5 13.5 20 25 B01 N01 T01 F ZP T F Width across flats H Width across flats J A 36 15.5 12.5 2 Rc1/8 NPT1/

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.

NCA1

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

Air Cylinder NCA1 Series

1/2 1 1/2 3 1/2 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 3 13/16 BORE E EE(NPT) F G J K ND NT TN ADD STROKE LB P SN 8 8 1/2 3/4 3/4 2 1 1/2 9/16 1 1/8 3/4-10 4 1/2 5 7/8 3 1/4 3 1/4 10 10 5/8 1 3/4 2 1/4 2 11/16 1 1/2 1-8 5 1/2

Table of Contents

Specifications. 5 5 12 13 13 13 15 15 16 22 22 23 24 26 42 43 43 44 44 45 48 49 49 50 50 51 53 53 54 55 57 57 58 59 60 64 64 65 66 69 70 70 71 72 75 76 76 77 78 79 82 84 85 86 86 86 88 89 95 95 96 96 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com How to Order.

SY

SS5Y51, #3 + #13 M type plug connector .

CM2

size (mm) In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13. 20 20 20 144 37 62 15 24 M20 x 1.5 1/8 6 8 8.5 13 17.5 21.5 25 25 25 152 41 62 15 30 M26 x 1.5 1/8 6 8 13 17.5 10.5 24.5 32 32 32 154 41 64 15 34.5 M26 x 1.5 1/8 6 8 13 17.5 11.5 27 40 40 40 188 45 88 21.5 42.5 M32 x 2 1/4 8 11 16 21.5 15 32.5 6-4-33 34 Series CM2W Trunnion Style (

V100

VK VZ Note) For VQZ100, refer to page 4-14-13.

Compact 5-Port Solenoid Valve

14 15 16 L1 159.8 166.3 172.8 179.3 185.8 192.3 198.8 205.3 211.8 218.3 224.8 231.3 237.8 244.3 250.8 L2 56.4 62.9 69.4 75.9 82.4 88.9 95.4 101.9 108.4 114.9 121.4 127.9 134.4 140.9 147.4 L3 185.5 198 198 210.5 210.5 223 223 235.5 235.5 248 248 260.5 273 273 285.5 L4 175 187.5 187.5 200 200 212.5 212.5 225 225 237.5 237.5 250 262.5 262.5 275 L5 13 16 13 16 13 16 12 15 12 15 12 15 18 15 18

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

LEC-OM02704CN

UL/C-ULK5 13 19 13 13.6 (1) (a) () SD 1(4.12) (b) ( ) (c) () 13 20 13 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1. ()(FR-BIF()) 2.

ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

CQ2

16 16 18.5 13.5 11.5 14 D-F9W D-F9WV D-F9BAL D-A7 D-A80 D-A9 D-A9V D-F9 D-F9V D-A79W Bore (mm) A 9.5 12.5 15.5 15.5 18 13 11 13.5 A 7 10 13 13 15.5 10.5 8.5 11 B 5.5 5 6.5 7 6 8.5 11.5 14.5 B 6 5.5 7 7.5 6.5 9 12 15 B 3 2.5 4 4.5 3.5 6 9 12 B 10 9.5 11 11.5 10.5 13 16 19 A 17 12 10 12.5 B 5 7.5 10.5 13.5 A 21 16 14 16.5 B 9 11.5 14.5 17.5 A 20 15 13 15.5 B 8 10.5 13.5 16.5 12 16 20 25 32

SQ1000/2000

(A)(B) (A)(B) 4 2 4 2 When ordering with manifolds 5 13 5 13 For adding stations (R1) (P)(R2) (R1) (P)(R2) When only valves are required.

ZR

(Refer to page 13-3-37.)