AR Series Modular Type Regulator

A digital pressure gauge is recommended for such situation or as deemed necessary. 451 AR10-A to AR40-A Series Flow Rate Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AR10-A M5 AR20-A Rc1/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 25 50 75 100 125 150 0 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min

XL-OMV0002

227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** 1)(FKM:No.1349-80)(**) AS568-025-XN1 2)4 3) FKM for ULTIC EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

Digital Flow Switch Series PFA For Air Series PFW For Water

Flow Rate Conversion Mode 13 Series PFA Operation 1. Initial Setting Mode For -M (fixed SI unit) SET SET Press the SET button. Press the SET button. Note 1) Press the SET button. Performs setting of display units. Changes with the UP button. Performs the display setting.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Dimensions Tubing/SRF30-T11 2-30 IN OUT 67.7 32.3 52 Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Air Catch Sensor

Switch assy O ring Gasket Base 3.8-4 ISA Dimensions/Centralized Wiring (Terminal Block Box Style) Unit Manifold With bracket Deflection level indicator Terminal block box 34 L2 40 34 L1 Deflection level indicator Terminal block box 75 40 90 10 10 10 Rc1/8 SUP.

VNH

9.5 140 13 210 15.7 Rc 46 Pilot port size Weight (kg) Face-to-face dimension (mm) VX 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.1 80 5.6 100 8.2 115 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 2 60 VX3 No

CDQ2BP series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Two switch spacers are included with the product with built-in magnet. 906 Rotary Actuator 11-CRA1-Z Dimensions: Basic Type, 11-CRA1S30 Size: 30 Single shaft Double shaft 75 10 8 6 0 0.2 8 (g6) 7.8 0 0.2 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite side 4 locations) 28 40 4 x 6 (Mounting hole) 9 16 0 0.1 8g6 9.2 14 3 M5 x 0.8 (Vacuum suction port) 0 0.025 3 2 x Cushion valve (Width across

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

Process Valve

VNA VNA VNA VNB SGC Cylinder speed (mm/s) VNA SGH VNA Supply pressure Conditions 0.49 MPa VNC Hydraulic fluid ISO VG32 2 1 2 1 Load Piping length No load 2 1 1 m VNH VNA111A, CCVSO2 VNA 3/8B (9 mm) Piping diameter VNA211A, CCVLO2 VND 1/2B (13 mm) Bore size (mm) VNA311A 3/4B (19 mm) VCC VNA411A 1B (25 mm) VNA Refer to Air-hydro Unit pages in Best Pneumatics No. 2-1 (CC series) for further

High Pressure Coolant Valve

Proof pressure Ambient temperature Max. operating frequency Mounting position Port size Orifice diameter (mm) Flow rate characteristics Kv Conversion Cv Pilot port size Weight (kg) Face-to-face dimension (mm) 5.5 MPa 10.5 MPa 5 to 50C Note 1) 20 times/min Vertical upwards 1 2 3 8 3 4 1 3 8 1 2 3 4 1 3 8 1 2 3 4 1 7.1 8.7 10.6 14.3 3.9 5.2 6.2 7.3 8 9.5 13 15.7 1.9 3.6 4.5 7.8 0.6

3 Port Air Operated Valve VPA3145/3165/3185 Series

118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

Angle Seat Valve /

Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *

ZSE5/ISE5

1 sheath} Argon 0 SUS630 Pressure sensor Nitrogen gas 0 Firtil1Qs SU$304 Chlorine gas X 2 Digital pressure switch for general purpose fluid Series Z5E5/15E5 Dimensions (mm) Scale: 75% 30 39 LCD With back light g '" .; ~ '" '" DOWN button UP bulton ~ .{ LED (red) I SET button T2 NPTF'4 M5X O 8 deplh 5 I 12.3 20 4 .0' 2.7 17 depth 6.5 i 28 View A With bracket 50 (44) 4.%4S 40 30 39 II i

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

Heat Resistant 2-Color Indicator

Specications [mm] Table 1 Cylinder Strokes Bore size Stroke 16 15, 20, 25, 30 20, 25 15, 20, 25, 30, 35, 40, 45, 50 32 to 63 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Ambient and uid temperature range 32 to 302F [0 to 150C] Seal material Fluororubber Grease Heat resistant grease Standard stroke See Table 1. Dimensions See below.

D. P. Lube ALD600/900 Series

This will prevent the oil filler plug from flying out. 126047(2) 13 Check valve assembly (2 pcs.) 126127A 126022A Filter element 14 Bronze 11294-70B 11294-70B 1054 D. P. Lube ALD600/900 Series D.P.

PF-OMM0004_C

No.PF-OMM0004-D / / PF3W7## SMC 2 11 13 14 16 17 19 21 24 26 26 F1 OUT1 60 F2 OUT2 36 F3 42 F10 43 F20 47 F22 48 F30 50 F80 51 F81 52 F82 53 F90 54 F98 55 F99 56 57 61 61 65 65 71 79 81 88 -1No.PF-OMM0004-D (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.