AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

IDX-OM-U010

Inspection record . 13-1 13.1 INSPECTION RECORD . 13-1 IDFC60/70/80/90 Series IDX-OM-U010 Chapter 1 Safety Instructions Chapter 1 Safety Instructions 1.1 Before Using Air Dryer.

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Recommended flow rate Absolute filtration accuracy (m) Recommended flow rate (l/min) 2 4 20 6 13 Operating temperature: 0 to 80C Differential pressure resistance: 0.5MPa 8

AC Servo Motor Driver (Pulse input type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Rotary One-touch Fittings Manifold Series KM

D1 D2 L1 L2 L3 P Q1 Q2 M1 M2 6 KM13-04-06-3 10.4 18 19 20 21 22.5 13 15.5 15.5 19 19 60 63.5 70.5 74.5 81.5 12.8 9.9 11.1 11.1 12.8 12.8 13 16 18 23 27 17 18.5 18.5 21 21 4.5 6 6 7.5 7.5 4 10.4 16 38.2 KM13-04-08-3 15.2 KM13-06-08-3 12.8 15.2 KM13-06-10-3 18.5 KM13-08-10-3 15.2 18.5 8 8 6 12.8 17 45.4 10 10 8 15.2 18.5 52.6 KM14/Dimensions Applicable tube O.D.(mm) Part No. D1 H (Hex.)

4/5 Port Air Operated Valve Series SYJA3000 1

center SYJA7 20-01 3 position closed center/exhaust center/pressure center SYJA7 403 4 5 2-4.3 (For mounting) 3 4 5 01 02 2-3.2 35 34 8.5 (For manifold mounting) 2-M5 x 0.8 (Pilot port) 17 B A 1 34 27 13 1 B A A B 3 1 1 R1 P R2 32.5 45.5 2-M5 x 0.8 31.5 38 (Pilot port) 64 2-3.2 Manual override 69.5 14 35 (For mounting) 89 Manual override 1/8,1/4 (P, A, B port) 29 28 25 21 1.6 14 89 18 2-

α PneuAlpha HARDWARE MANUAL

-15% Input Impedance > 800 kOhms Input Current 0.24mA / 240V AC~ Input Voltage 100 240V AC~, +10% -15%, 50 60 Hz Operation Indication Liquid Crystal Display Isolation Circuit None None Response Time (I09 I12) 20 40 ms 20 40 ms Response Time (I01 I08) 10 20 ms 10 20 ms Description AC Input Specication Description Sink (Common) Source (+ Common) 6 PneuAlpha Hardware Specification 2 Table 2.5

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

Dead volume LVM11: 11 l or less LVM1R, LVM11: 20 l or less The dead volume enclosed by the body and the diaphragm Valve width ( ): 13 mm 2 port 3 port Valve width 9.5 mm (LVM090), 20 mm (LVM200) are also available.

VXA21/22

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

2/3 Port Solenoid Valve for Chemicals

Dead volume LVM11: 11 l or less LVM1R, LVM11: 20 l or less The dead volume enclosed by the body and the diaphragm Valve width ( ): 13 mm 2 port 3 port Valve width 9.5 mm (LVM090), 20 mm (LVM200) are also available.

PSxx-OMT0001CN

2 ISA3--B-R ISA3--B-R ISA3--B-RN ISA3--B-LN 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 C(4 ) C(6 ) F(G ) H 13 13.6 19 -24No.PS-OMT0001CN-E 2 ISA-17() Y200T-A() ISA-20() -25No.PS-OMT0001CN-E 2 ZS-31-B(()) ZS-31-C(()) ISA-21-() L 2 ISA-21-2 139 3 ISA-21-3 177 4 ISA-21-4 215 5 ISA-21-5 253 6 ISA-21-6 291 -26No.PS-OMT0001CN-E 3 SUP () (Nm) (Nm) ISA3 Rc1/8G1

K35-OMX0029

Signal name Input/output status Description 1 Sig-in+ Input 4-20 mA analog input signal (+) 2 Sig-inInput 4-20 mA analog input signal (-) 3 JOG+ Input JOG operation signal (Move to the extended end direction) 4 JOGInput JOG operation signal (Move to the retracted end direction) 5 PWR_DC24V DC+24 V Power supply 6 PWR_GND Power supply GND 7 Pos-out+ Output 4-20 mA analog output signal (+) 8

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

to +80C 20 to +70C 40 to +85C 25 to +90C Cable 20 to +70C Min. bending radius (Fixed) 67 mm 60 mm Protection class 100 IP67 (Only with screw tightened) Allowable repeated insertion/withdrawal 200 Material of knurl Zinc die-cast (Nickel plating) Brass (Nickel plating) Zinc die-cast (Nickel plating) Contact (Surface treatment) CuSn (Au plating (Ni underplating)) Phosphor bronze (Au plating

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Installation of Threads Caution Selection Caution KQ2 1.

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

SYJA3000

) 2-M5 X 0.8 35 (Mounting holes for manifold) 17 (Pilot port) B A 1 34 B 27 A A B 13 1 1 1 3 R1 P R2 32.5 45.5 2-M5 X 0.8 31.5 38 (pilot port) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load