11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

MRQ

(mm) (mm) Stroke 15 20 30 40 50 75 10 25 5 100 20 30 20 15 15 17.5 25 Y 12.5 15 17.5 20 Q 20 20 30 20 68 70.5 68 68 68 70.5 80.5 83 75.5 E 70.5 MRQFS40SMRQ40, #3 (Flange only) 1.5-15 Series MRQ Made to Order Specifications -X1 to X5 Consult SMC for the detailed specifications, dimensions and delivery.

CJP

MB C95 CA1 CS1 Standard stroke (mm) Rod end thread With thread Without thread B 5, 10, 15, 20 5, 10, 15, 20, (25), 30 6 10, 15 CJP D 10 15 F CDJP D 10 15 F 90 S With Auto Switch Number of auto switches Action Air cylinder with auto switch S 2 1 Mounting Bore Size * 5 stroke: S type only With auto switch 6 10 15 6mm 10mm 15mm Symbol Mounting Standard B F L D T Basic Flange Foot Clevis Trunnion

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work

3 Port Solenoid Valve Metal Seal Series VZ200 1

2 Pilot valve assembly SCZ2-NBR VQ VKF VQZ VZ VS VFN 4-15-3 4 Series VZ200 Construction (Sub-plate mounted) N.C. (VZ215) N.O.

Microspeed Cylinder

Refer to pages 15 through 24 for safety instructions and precautions. Bore size (mm) Standard strokes (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Precautions Caution Mounting and Accessories 1.

Pin Clamp Cylinders

30 Diamond cut shape (Guide pin dia.: 9.5 or more) Mounting surface 770.1 D 300.05 20 15 15 Port side (183) Clamp arm position 30 7.5 10.5 A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side 2 x 6H7 Depth 10 4 x M8 x 1.25 Depth 12 2 x Rc1/8 D Clamp arm Port side C A 45 49.5 B Hole diameter of workpiece C D d K SR Q Model number Hole diameter

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

6, 10, 15, 20, 25, 32, 40 50, 63 Magnetically Coupled Rodless Cylinder Series 12-CY3B How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 CY3B 300 15 Cylinder stroke (mm) Type Bore size Port thread type Symbol 6 10, 15 M3 x 0.5 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 50, 63 TN TF Model Maximum manufacturable stroke Cushion Bore size (mm) Standard stroke (mm) Port

MXH

NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 (mm) Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40 50 20 20 94 6 50 25 104 70 25 6 60 114 70 30 6 30 8-2-18 17 Compact Slide Series MXH Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height A 22(24.5) D-A9 D-M9

33

of 20%, V 1120 [W] x 1.2 = 1344 [W] After 15 minutes, cool 32C down to 20C.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

CRB1/Size: 10, 15, 20, 30

(MPa) 0.2 0.15 Speed range(1) (sec/90) 0.03 to 0.3 0.04 to 0.3 0.0003 Allowable kinetic energy (J) 0.02 0.0012 0.0033 Size 10 Size 15 Double vane 15 Shaft load Allowable radial load 30 15 25 10 (N) Allowable thrust load 25 10 20 Bearing Bearing Order Made Port position On the body side or in the axial direction P.1.1-20 to 1.2-28 Port size (Body side, Axial direction) M3 X 0.5 M5 X 0.8 Shaft

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Series 12-REA Sine rodless cylinder

20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G

Micro-Mist Separator with Prefilter Series AMH

66 17 10 218 80 22 10 218 80 19 10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37

PFxx-OMK0003CN

PF-OMK0003CN-E F 15[V]F.S.=5-1=4[V] (1%F.S.=40.01=0.04[V]) F.S. (full spanfull-scale) 90 -13No. PF-OMK0003CN-E 3%F.S. M3 (2 ) (M315 L) 0.320.02 Nm L M315L () M315L L () L () M4 (2 4 ) 1mm (22 ) -14No. PF-OMK0003CN-E 0.320.02 Nm L () L () M4 (2 4 ) 1mm (22 ) -15No.

ASD

46.9 46.5 41.5 23 19.8 14 R(PT)3/8 19 40 35 10 ASD530F-03-10S 21 98 32.6 54.1 18.5 23.1 12 22 ASD530F-03-12S 101 34.4 55.9 20.9 10 21 177 ASD630F-04-10S 32.6 64.3 18.5 57.3 64.8 57.6 50.1 18.6 R(PT)1/2 49.6 42.1 28.6 26.5 25.9 24 12 22 179 ASD630F-04-12S 34.4 66.1 20.9 Reference dimensions of M5 X 0.8, R(PT) thread after being screwed in. 4.1-15 Dual Speed Controller with One-touch Fittings

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

External gripping force Internal gripping force MHS2-16D MHS2-16D 30 Pressure 0.6MPa Pressure 0.6MPa 30 0.5MPa 0.5MPa Gripping force N Gripping force N 20 20 0.4MPa 0.4MPa 0.3MPa 0.3MPa 10 10 0.2MPa 0.2MPa F 0 0 15 20 15 5 5 10 10 20 25 25 30 30 F Gripping point L mm Gripping point L mm MHS2-20D MHS2-20D 60 60 Pressure 0.6MPa Pressure 0.6MPa Gripping force N External gripping Gripping force

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Recommended terminals NVFR 2000, 3000: 1.25-3, 1.25-35, '1.25Y-3N, 1.25Y-3S (1.25mm centers) (spade type, size 4, 22-16 AWG). . NVFR4000: 1.25-3.5M. 1.25Y-31. 1.25Y-3M. .

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW250 VDW350 36 (27.6) 22 Lead wire l approx. 300 Lead wire l approx. 300 20 27 SMC SMC 30 40 1 1 20 27 Rectifying device AC type 23.5 M5, 1/8 3 (N.O.) port 1/8, 1/4 3 (N.O.) port Rectifying device AC type 25 34 20.5 45 28 3 3 69 86 (82.5) 1 8 5 15 M5, 1/8 1 (IN) port M5, 1/8