Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

IDX-OM-U022

4 P 5 X4 PRR COM1 () X0 6 THR X1 THS2 THS1 CM L X2 OLR N PRS2 PRS3 MC1,2 X3 EDV PE P P THR THS1,2 24V TB1,2 T V V FM1,2 SWL PRR PRS1 PRS2 PRS3 PLC GFCI EDV IDFA100F150F 6 6 6.4 IDX-OM-U022 6.

Digital Flow Switches, Series PF2A, Series PF2W

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

Digital Flow Switches

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

VF1000-OMP0001

M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN

ZQ-OM01401

21 - No.ZQ-OM01401-B 7.2 1 N.C., ZQ1-V114-5LUB-A (1) (2) (1) L L 0.3m LO L (2) B N.O. () ZQ1-V124-5MUB-A (1) (2) (1) M M (0.3m) MO M () (2) B () ZQ 1VQ110 L -5 L -A (1) (1) L L 0.3m LO L 22 - No.ZQ-OM01401-B Assy N.C.N.O.Assy 1) SY100-30-4A-6 300mm 6 600mm (1) (1) 10 1000mm 15 1500mm Assy 20 2000mm A X T6 61 -13 A6 25 2500mm 30 3000mm (1) 50 5000mm N.C.N.O.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

How to Order 2 2 0 0 01 M AS Option Body size None With seal Nil S 1 2 2 Meter-out Meter-in M5 standard 1/8, 1/4 standard Type Direct cylinder elbow type Control type M5 and U10/32 are not available with seal.

7

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9N P P P p p IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9P P P P p p 2-wire 12 V M9B P P P p p 3-wire (NPN) 5 V, 12 V M9NW P P P p p IC circuit 3-wire (PNP) M9PW P P

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

Compact Cylinder with Solenoid Valve/

) EA M J F1 (KB) KA 2 x 2 x OB counterbore depth RB M Z X B + Stroke L EB A + Stroke EA E Axial piping Bore size (mm) F1 32 40 50 63 30 34.5 43.5 51 Bore size (mm) Stroke range (mm) A B E EA EB F HA HB J KA KB L M N OA 32 40 50 63 5 +0.2 0 5 +0.2 0 6 +0.2 0 6 +0.2 0 28 0.2 33 Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8

HRX-OM-X037

Applicable Model HRL300-A-40-T3 CH1 CH2 Rated flow rate (Outlet) L/min Same as standard product 380.45MPa Maximum flow rate L/min Same as standard product 60 Pump Maximum lifting height m Same as standard product Same as standard product Minimum operating flow rate L/min Same as standard product 10 Tank capacity L Same as standard product 12 It differs from the standard cooling capacity.

ITV

Connection Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02 p p qAF3000 wAFM3000 eITV2000 Connection NPT3/8 N03 p p Connection NPT1/2 N04 p Connection G(PF) 1/4 F02 p p REGULATOR Connection G(PF) 3/8 F03 ITV3000 p p Connection G(PF) 1/2 F04 p Approx. 243 Modular Connection Part Numbers Approx. 172 ITV20ll ITV30ll Description AF3000

HRX-OM-W002

flow rate 2 / / Ma no (M ma TNN ALXX Allarm number (Allarm number maximum FLOW / / / PU P Pump output setting 3 (%) 900 Displays only when the alam is generated.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

XB13 CXT Standard part number M L Microspeed cylinder Specifications Guide cylinder Slide unit Compact guide cylinder Dual rod cylinder Compact slide Platform cylinder Magnetically coupled rodless cylinder CJ2 CM2 CG1 MB CU CQ2 CQS CY1 MGP MGGM MGCM CX2 CXW CXS MXU Air cylinder/Standard type Freemounting cylinder Compact cylinder Compact cylinder Applicable cylinder M L M

IDX-OM-W023

3 1 2 PE N L TB L N PE 2 3 1 TB TB ILS TB TDR MC TDR MC ILS TDR MC ILS ILS ILS MC MC MC MC OLR MC PTC MC MC EDV TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.4-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

HRX-OM-X084

flow rate 2 / / Ma no (M ma TNN ALXX Allarm number (Allarm number maximum FLOW / / / PU P Pump output setting 3 (%) 900 Displays only when the alam is generated.

Multistage Ejector Series ZL112/212 1

Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Label EJECTOR MULTISTAGE ZL 66.5 35.7 59.5 ZY 21.5 ZQ 4.5 166 17 ZF 8.5 216 36 ZP ZCU AMJ 85 59 Misc. 4-M4 x 0.7 Thread depth 8 (Mounting hole) With supply valve ZL112-K2L-E25(L)-M P Blanking plate assembly (SYJ500-10-2A) P V SMC PRESSURE SWITCH V SET RESET Supply valve Circuit

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

IDX-OM-W011

IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded