Series: 5 (SY5000), Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting

Series: 5 (SY5000), Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting)

Series: 5 (SY5000), Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting

Series: 5 (SY5000), Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch

Series: 7 (SY7000), Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting)

Series: 7 (SY7000), Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting

Series: 5 (SY5000), Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting)

Series: 7 (SY7000), Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch

Series: 7 (SY7000), Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting)

Series: 5 (SY5000), Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting)

Series VQ Metal Seal/Rubber Seal Body Ported

Manifold Specifications Series Porting specifications Applicable stations Port location Port size P, R A, B C3, C4, M5 C3, C4, C6, M5 C4, C6, C8 C6 C6 C8 VQ0 VQ1000 VQ2000 Side Side Side Max. 16 Max. 16 VV5Q14 Max. 16 Wiring Specifications/Negative COM (Option) Wiring Specifications/Positive COM The lead wires are connected to the valve as shown below.

Table of Contents

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-G5BAL and D-H7BAL switches are set on the cylinder with the stainless steel screws above when shipped.

CJ2

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

(mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A port) P=19 21 22.5 9.5 R X R X P P 43 43 71.5 [72.8] 67.5 81.1 35 35 C6: MAX. 6 C8: MAX. 6.5 C6: MAX. 6 C8: MAX. 6.5 (Lead wire length) 300 80.6 [87.1] 300 (Lead wire length) (P/R port) 4-Rc (PT)1/4 57.1 [ ] for AC Other dimensions are the same as the grommet

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Pg.7 Indicator light 3.5 to 7 : AC 61.5 54 M plug connector (M): VQZ2l2(R)-lMl-C4, C6, M5 36 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 89 Indicator light 77 78 37.5 42.5 : AC 2.10-9 VQZ100/200/300 Body Ported Dimensions: VQZ300 Valve single unit C6, C8, C10, 02 Grommet (G): VQZ3l2(R)-lGl-C6, C8, C10, 02 C6: One-touch fittings for 6 C8: One-touch fittings for 8 300 (Lead wire) 75.5

New

13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

CM2

BBA3: D-B5/B6/G5 BBA4: D-C7/C8/H7 "D-H7BAL" switch is set on the cylinder with the screws above when shipped.