1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
2% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?4 to 6.5When not operating: Zero, When operating: Max. 10 /min (ANR) (Supply pressure 0.88 MPa)UniversalNot required (3)
or less Switch Output Output type NPN or PNP open collector OUT1: General-purposeOUT2: Valve control Max. load current 80 mA Max. applied voltage 26.4 VDC Residual voltage 2 V or less (at load current of 80 mA) Response time 2.5 ms or less (with anti-chattering function:20, 100, 500, 1000, 2000 ms) Short circuit protection Yes Repeatability 0.2%F.S.1 digit Hyster esis Hysteresis mode Variable
or less Switch Output NPN or PNP open collector OUT1: General-purposeOUT2: Valve control Maximum load current 80 mA Max. applied voltage DC26.4 V Residual voltage Max. 2 V (at 80 mA load current) Response time 2.5 ms or less (response times available for anti-chattering function: : 20, 100, 500, 1000 or 2000 ms) Short circuit protection Provided Repeatability 0.2%F.S.1 digit Hyster esis
Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.
Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -
Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option
160 mA Minimum applicable load COM (N.C. and N.O. common) (2) Rating Precautions 1.