PF2D

Display (PF2D30/31) Sensor 40 Brown 15 6 2 Analog output Switch output or Pulse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24 VDC ZSE ISE White 7 3 Black PSE A 62 52 42 5 1 Blue Z I SE3 PF2D5--1 A Model PF2D520 12.7 Display (PF2D30/31) PS PF2D504 4-4.5 9.52 Sensor Brown 2 6 Z I SE1 2 52 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

38.5 25 M5 to 0.8 17-5-52 11 Series LVD Fittings and Special Tools Fittings Changing tubing sizes VC The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing.

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

VQ4000

or less 50 or less Rubber seal 36.0 (2.0) VQ43 1 47 or less 45 or less Metal seal 36.0 (2.0) VQ44 0 0.28 (0.34) Exhaust center 52 or less 50 or less Rubber seal 39.6 (2.2) VQ44 1 47 or less 45 or less Metal seal 36.0 (2.0) VQ45 0 Pressure center 0.28 (0.34) 52 or less 50 or less Rubber seal 39.6 (2.2) VQ45 1 0 5 0 5 57 or less 55 or less Metal seal 19.8 (1.1) VQ46 0 Double check 0.50 (0.56

VQC

or less 3-position pressure center Rubber seal VQC4301 (A) 4 (B) 2 6.2 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less Metal seal VQC4400 Exhaust center 280 7.0 7.3 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal VQC4401 6.2 6.4 0.18 1.9 0.18 1.6 45 or less 47 or less Metal seal VQC4500 Pressure center 1 (P) 5 (R1) 3 (R2) 7.0 7.1 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal VQC4501

ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 13-9-9 10 Series ZQ Manifold Exploded View 6 3 6 4 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

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52 52 53 54 54 55 23 23 23 23 24 24 24 24 26 26 27 28 55 55 J5 57 - C o T E N T S T A B L E o F Load Fatio Speed Control Air Flow and Consumption Rotary Actuators Rack and Pinion Type Vane Type Rotary Actuators: Sizing Rotary Actuato|s Torque and Inertia Spcial Actuators Locking Cylinder Rodless rylinders Wilh magnetic coupling, unguided Guided types, with magnetic coupling Guided, with

Compact

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

Actuation: 1 (2-Position Single), Barrier: w/o Barrier, Electrical Entry: LL (Plug Connector w/Cover Type), Lead Wire Length: 6 (600mm), Manual Override: Non-Locking Push, Port Size: 02 (1/4), Thread Type: T (NPTF), Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Barrier: w/o Barrier, Electrical Entry: LL (Plug Connector w/Cover Type), Lead Wire Length: 30 (3000mm), Manual Override: Non-Locking Push, Port Size: 02 (1/4), Thread Type: T (NPTF), Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Barrier: w/o Barrier, Electrical Entry: TT (Cable Type), Lead Wire Length: 100 [10000mm (semi-standard)], Manual Override: D (Push Turn Locking Slotted Style), Port Size: 02 (1/4), Thread Type: T (NPTF), Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Barrier: w/o Barrier, Electrical Entry: TT (Cable Type), Lead Wire Length: 30 (3000mm), Manual Override: D (Push Turn Locking Slotted Style), Port Size: 02 (1/4), Thread Type: T (NPTF), Bracket: F2 (w/Side Bracket)

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Plug Connector w/Cover Type, Lead Wire Length: 600mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF, Bracket: w/Side Bracket

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Plug Connector w/Cover Type, Lead Wire Length: 3000mm, Manual Override: Non-Locking Push, Port Size: 1/4, Thread Type: NPTF, Bracket: w/Side Bracket

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Cable Type, Lead Wire Length: 100 [10000mm (semi-standard)], Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF, Bracket: w/Side Bracket

Actuation: 2-Position Single, Barrier: w/o Barrier, Electrical Entry: Cable Type, Lead Wire Length: 3000mm, Manual Override: Push Turn Locking Slotted Style, Port Size: 1/4, Thread Type: NPTF, Bracket: w/Side Bracket

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

53.5 46.1 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 16.2 12.9 20.6 23 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 46.5 41.5 40.2 35.2 34.4 55.3 49.1 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 23 59 18.5 19 AS431FG-04-10 AS331FG-N03-11 32.6 58 53.5 21 32.6 49.4 43.7 10 18.5 3/8" 17.9 16.2 104 65 16.2 23 21 25.8 R 1/2 57.6 50.1 28.6 24 49.6 42.1 AS431FG-04-12 AS431FG-N04-11 36.3 61.7 55.3 22 32.6 52

Basic Type/Direct Mount Type

8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 CB 2 2 3 3 3 5 5 5 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 CR 0.5 0.5 1 1 1.5 2 2 3 GW 25.5 31.5 37.5 42.5 53.5 63.5 81.5 93.5 HC 25 31 38 43 54 66 84 96 D 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 H 26 32 39 44 55 67 85 97 HA 24 30 36 41 52