Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Action Double acting Operating pressure 0.15 to 0.7 MPa Proof pressure 1.05 MPa 10 to 60C (No freezing) Ambient and fluid temperature 50 to 300 mm/s (Adjuster option/Metal stopper: 50 to 200 mm/s) Piston speed Rubber bumper (Standard, Adjuster option/Rubber stopper) None (Adjuster option/Metal stopper) Cushion Non-lube Lubrication +1 0 mm Stroke

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

ZSE30/ISE30

-color display (Red and green) Sampling cycle: 5 times/s Display PF2 2% F .S. 2 digit (at 25C ambient temperature) 2% F .S. 1 digit (at 25C ambient temperature) Display accuracy IF Light up when output is ON (Green) 2% F .S. or less (based on 25C) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating and stored: 35 to 85% RH (No condensation) 1000 VAC for 1 min

CM2

CM2 H L 40 F A J 150 Standard DM2 C H L 40 F A J C73 150 With auto switch Rod boot Without rod boot Nylon tarpaulin Heat resistant tarpaulin Bore size 20mm 25mm 32mm 40mm Air cylinder with auto switch 20 25 32 40 Number of auto switches S n J K 2 1 n Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switches.

ZX

R1 1 ZX1 06 R ZZX1 Supply port location 01 1 Stations Arrangement (First station from the right end of the valve side is station 1.)

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Code Delivery pressure

Compact Guide Cylinder

Max. speed Up to 300 mm/s Up to 400 mm/s Up to 500 mm/s Coefficient 1.7 1 0.6 10 MGPK Series L L m m Plate Material Carbon Steel /MGPKM Vertical Mounting Operating pressure: 0.5 MPa or more Operating pressure: 0.4 MPa MGPKFM12 to 50 50 mm stroke or less, V = 200 mm/s or less Over 50 mm stroke, V = 200 mm/s or less 100 100 50 50 40 40 32 32 10 10 25 25 Load mass m [kg] Load mass m [kg] 20

1.63

speed of 200 mm/s.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

01 subplate, VQZ2000 VALVE, SOL 4/5-PORT*** $8.84 Add to Quote Add To Cart Add to Cart SMC VQZ2000-S-01-Q subplate, 4/5 PORT SOLENOID VALVE $10.00 +

7.4

S070P B 5 G 1 Base Mounted Body Ported Base Mounted EX510 S 01 0 Voltage Accessory Output specifications 0 NPN output (Positive common) 1 PNP output (Negative common) Symbol Specifications Nil None 1 Stopper plate is included.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

HEC_W-E

J o 0001 Serial No. Manufacturing month o: January U: July P: February V: August Q: March W: September R: April X: October Manufacturing year S: May y: November J: 2005 T: June Z: December K: 2006 L: 2007 . . . 4-1 Unit Overview 4.3 Model No. label Model No. label is attached to the unit and indicated as shown below.

CY1F

/s Piston speed mm/s Piston speed mm/s 4 Series CY1F Vertical Actuation qVertical operation In vertical operation, observe the maximum load mass and the maximum operating pressure shown in the table below to prevent a drop due to slipping off of magnet couplings.

CLQ

CDLQ With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

NAAMS Standards Compliant

Y Without switch cover With switch cover 50 45 45 5 40 46 88 20 20 46 48 78.4 134 136 92 132 63 55 45 10 55 52 104 25 25 52 54 78 146.5 148.5 104.5 138 With front mounting hole Metal cover type NA0.05 NC NB0.05 Release point Y VC0.1 VB0.1 K +0.1 0 Metal cover open 2 x V H7 depth I 4 x NN depth S VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32

Coolant Valve

Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626