CV/MVGQ

Description Material Part no. 20 25 32 40 Solenoid valve !5 No. Urethane Bumper A !6 Urethane Bumper B Rod seal NBR PDU-8Z PDU-10Z PDU-12LZ PDU-14LZ #0 !

CV/MVGQ

Description Material Part no. 20 25 32 40 Solenoid valve !5 No. Urethane Bumper A !6 Urethane Bumper B Rod seal NBR PDU-8Z PDU-10Z PDU-12LZ PDU-14LZ #0 !

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Table of Contents

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

Air Cylinder

D-H7l D-H7C D-G5l/K59 D-G5lW/K59W D-G59F D-G5NT D-G5BA D-C7l D-C80 D-C73C D-C80C D-B5l D-B64 D-B59W D-A9l D-A9lV Bore size A B A B A B A B A B A B A B 20 33 24 (32) 29 20 (28) 28.5 19.5 (27.5) 29.5 20.5 (28.5) 25 16 (24) 23.5 14.5 (22.5) 26.5 17.5 (25.5) 25 32.5 24.5 (32.5) 28.5 20.5 (28.5) 28 20 (28) 29 21 (29) 24.5 16.5 (24.5) 23 15 (23) 26 18 (26) 32 34 25 (33) 30 21 (29) 29.5 20.5 (28.5

MY1

63 50 40 32 25 Mounting position A 278.5 323.5 184.5 229.5 139.5 B 121.5 136.5 95.5 110.5 80.5 Operating range l Note) 5.5 5.5 5 5 5 B A MY1C (Cam follower guide type) (mm) 63 50 40 32 25 Mounting position A 97.5 157.5 127.5 278.5 323.5 B 122.5 182.5 152.5 121.5 136.5 Operating range l Note) 5 5 5 5.5 5.5 B A MY1H (High precision guide type) (mm) 40 32 25 Mounting position A 180 216 131.5

C85

B Band mounting Only 20, 25 Applicable auto switches and bands are shown on page 6-1144.

CQS

With auto switch A 22 22 24.5 27.5 B 36 36 47 50.5 A 27 27 34.5 37.5 B 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 31 31 37 40.5 B + Stroke A + Stroke Bore size (mm) 12 16 20 25 FD FT FV FX FZ L L1 Rod end male thread 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 3.5 3.5 4.5 5 14 15.5 18.5 22.5 Flange bracket material: Carbon steel Rod end nut Double clevis style: CQSDS

REA/REB

Packaged with Each Cylinder d C H B C d Part no. SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc.

REA/REB

Packaged with Each Cylinder d C H B C d Part no. SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc. MQQ M n n pcs.

JIS Standard Hydraulic Cylinder

C F GA GB NA NB P R S T CD RR SS U L l f Q B-rod C-rod B-rod C-rod 32 21.5 15 52 25 to 1400 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 22 38 40 12 15 52 52 25 to 1400 M10 x 1.25 65 45 12 32 15 36 30 3/8 42 141 11 25 16 16 209 22 38 1/3.5 stroke 50 15 15 55 52 25 to 1400 M10 x 1.25 76 52 15 40 19 43 35 1/2 46 155 13 31.5 20 20 230 25 45 63 15 20 65 55 25 to 1500 M12 x 1.5

SQ1000/2000

B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 COM () (+) 26 Positive COM spec. Negative COM spec.

CQS

D-A9l, D-F9lWV D-F9 , D-F9lW D-F9N B P D-A9lV D-F9lV D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult SMC for shorter strokes than indicated in the table.

0.4

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of branch type)) (DIN rail clamp screw) R R R BUS 76.7 76.5 12 3 X 3 3 72 BUS IN B X 49.5 B B B B B B B P X P 12 P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.

Table of Contents

(B contact) mm Standard stroke 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) 3 (2) horizontal Note 1) N.C. (B contact) Body weight kg N.O. (A contact) N.C.

Stability of suction position,

A ZP3E Series Pad diameter 32 to 80 Dimensions/With Female Thread Adapter: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T32UMl-B8 ZP3E-T32UMl-B10 ZP3E-T40UMl-B8 ZP3E-T40UMl-B10 ZP3E-T50UMl-B8 ZP3E-T50UMl-B10 Width across flats 14 17 40 Width across flats 14 31 17 A Width across flats 14 17 31 A A 15 25.5 8 B 3 14.5 25 8 14.5 25 8 B 2 B 2.5 35 32 43 40 53 50 Dimensions Dimensions

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

42

) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations

LX

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

CA2

MB-S10 100 +0.084 0 162 13.5 100 90 15 188 214 26 24 17 75 130 135 120 25 B Z + Stroke Double clevis bracket Material: Cast iron DX DO DF 4-DT DH DS DA DL 4-DL B 90 DU DU DO DO DC Rotation DE Bore size (mm) A B A + B + 90 A 40 to 100 12 60 162 Note) This assembly drawing is provided as a reference.