Non-contact Gripper

A A A-A r q e w A A-A e r q w Component Parts No.

Bag Filter

order a sub-element with ring.

LX Series Compact Electric Actuators

I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

VCA

Surge voltage A high voltage which is momentarily generated in the shut-off unit by shutting off the power. 0.25 0.2 0.2 0.15 0.1 0.05 0.1 3. S = 6mm 5. S = 15mm 4. S = 10mm 7. S = 27mm 5. S = 15mm 7. S = 27mm 10. S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1.

MRQ

Position of rotation axis: Parallel to side b and passes a center of gravity. 1=m 12 a 2 1=m 4 r 2 oWith a load at the lever end rThin rectangle board (Parallelogram) Position of rotation axis: Perpendicular to the board and passes through center line. 2 1 2 2 a +K 1=m1 +m2 3 a Ex.)

Safety Instructions

Low frequency operation In order to prevent malfunction, conduct a switching operation of a valve every 30 days. Also, in order to use it under the optimum state, conduct a regular inspection once a half year. 17-6-10

Process Valve

Note 2) Please request a factory repair.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

ZQ

5 a 5 5 Component Parts No.

Soft Start-up Valve AV2000/3000/4000/5000 1

Using a regulator in the outlet side When mounting a regulator in the outlet side (A port side), use a residual pressure relief regulator (AR25K to 40K) or a check type regulator. With a standard regulator (AR10 to 60), the outlet side pressure may not be released when this valve is exhausted. 5.

•

(A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

VNH

240 VAC 50/60 Hz 9 Other Option Accessory Function plate (D sealing, with thread): DXT060-32-4A 17-4-32 3 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111

High Pressure Coolant Valve

Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A 628 A VNH Series High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid

VT317

Note: The orientation of a connector can be changed arbitrarily, depending on the combination of a housing (4) and a terminal box (3).

Compact Type Dual-Rod Cylinder Series CXSJ

A contact protection box should be used in any of the above situations. How to order lead wire length (Example) L D-F9P Specifications Nil Lead wire length 0.5 m 3 m 5 m L Z CD-P11 CD-P12 24 VDC 50 mA 200 VAC 12.5 mA 100 VAC or less 25 mA Part no.

q"s

Nole 5) When mounting a blanking plate and lhe regulator with diflerent pressure set. olease inlorm SI C ol the oder ol a manifold stalion beside a purchase order, Nole) Refer to the table below tor possible mixed combination, Uod.l rvl03tr tTvl05tl tw201tr rTv203tr tw205tr tw10ltr o tw103tr o a a o tTV't05tr o o a a trv20ttr o o tTV203tr o o a a tTV205tr o o a o Pressure response wilh no

CG5-S

Cushion ring Brass Replacement parts: Water resistant scraper (Part No.8) Note) Note) The scraper is held into the Rod cover with a light press fit. The scraper can be carefully pried out, and replaced with a press fit using a manual arbor press.