Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 15 mm, Rod End Thread: B (Without Thread), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 15 mm, Rod End Thread: B (Without Thread), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 15 mm, Rod End Thread: B (Without Thread), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m [Or None in the Case of No Switch], Number: 2 pcs. [Or None in the Case of No Switch], Option: XC22 (Fluoro Rubber Seals)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 15 mm, Rod End Thread: B (Without Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 25 mm, Rod End Thread: B (Without Thread), Auto Switch: A90V--Reed, DC Volt >5<24, AC Volt <100, LED, 2 Wire, Vertical, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 5 mm, Rod End Thread: B (Without Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 20 mm, Rod End Thread: B (Without Thread), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: Z (5m)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 20 mm, Rod End Thread: B (Without Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 15 mm, Rod End Thread: B (Without Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: Ø6 mm, Stroke: 5 mm, Rod End Thread: B (Without Thread), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Table of Contents

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG Courtesy of Steven

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

ISO Cylinder

A B Hs Hs Hs Hs Hs Hs Hs Hs Hs Hs D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9lV D-M9lWV D-M9lAV D-A9lV 17 B A A B D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-F7l D-F7lW D-J79 D-J79W D-F7BA D-F79F D-A7lH D-A80H 17 A B A B D-F7lV D-F7lWV D-F7BAV D-A7l D-A80 D-A79W D-H7C 17 A B A B D-C73C D-C80C D-J79C D-A73C D-A80C 17 Auto Switch Made to Order B A B A 102 C85/C75 Series Auto Switch Proper Mounting

Table of Contents

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

Rotary Actuator/Vane Type

S E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

NCQ8

A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18