VT325

Air flow direction: z Block, x c Conduit terminal (TS) Coil When the coil y is energized the plunger u is pulled down depressing the spool e via the overtravel assembly i and the air passage between port z and port x is opened and port c is blocked.

VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr

ZB-OM00301

17 - No.ZB-OM00301 V Ass y V Assy V Assy ( ) V Assy 2 1V V Assy 2V Assy Assy 18 - No.ZB-OM00301 O Assy V Assy Assy V Assy Assy 19 - No.ZB-OM00301 1TK1-123 2 3 1VKJ 2 3 1 0.1 2 0.1 3 0.15 -0.2 2 20 - No.ZB-OM00301 () ( ) ONOFF () 0.1Nm 1 ON 0 ) () () 1 (PA) 0 (AR) () 21 - No.ZB-OM00301 AXT661-12 0.2~0.33mm 2 (1.7mm) ) DXT170-71-1 3.2~3.7mm (DXT170-75

0.4

-B 40 W 50 L/min 1000 Hz 0.55 0.4 High speed response required for both ON and OFF -E 80 W 100 L/min 650 Hz 0.55 0.55 -F 40 W 100 L/min 550 Hz 0.7 0.55 -J 80 W 150 L/min 600 Hz 0.6 0.75 -K 40 W 150 L/min 500 Hz 0.8 0.75 * Current needs to be limited.

Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

VKF300

Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr

ZMA

Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.

Bearing Type: M (Slide Bearing), Bore Size: Ø16 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L [3m]

Bearing Type: L (Ball Bushing), Bore Size: Ø25 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L [3m]

Bearing Type: M (Slide Bearing), Bore Size: Ø20 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L [3m], Number: 3 pcs.

Bearing Type: M (Slide Bearing), Bore Size: Ø32 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC [0.5m Cord Length, M12-4 Pin Connector]

Bearing Type: M (Slide Bearing), Bore Size: Ø25 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC [0.5m Cord Length, M12-4 Pin Connector]

Bearing Type: M (Slide Bearing), Bore Size: Ø40 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L [3m]

Bearing Type: M (Slide Bearing), Bore Size: Ø32 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SBPC [0.5m Cord Length, M8-4 Pin Connector]

Bearing Type: M (Slide Bearing), Bore Size: Ø25 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L [3m]

Bearing Type: M (Slide Bearing), Bore Size: Ø16 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L [3m], Number: S (1 pc.]

Magnet: D (Built-in), Mounting: A [Double End Tapped [ø32 - ø50]], Bore Size: Ø32 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Magnet: D (Built-in), Mounting: A [Double End Tapped [ø32 - ø50]], Bore Size: Ø32 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 75 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3 m)