Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: Rc, Stroke: 400mm, Option: Rear Cushion, Cylinder Switch Type: M9B--Solid State , Gen.
Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: Rc, Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Pre-wired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -, Lock
Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: Rc, Stroke: 1100mm, Option: Cushion at Both Ends, Cylinder Switch Type: J59W--Solid State, 2-color Indication, 2 Wire, 0.5M, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit Switch Type
Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: Rc, Stroke: 300mm, Option: Cushion at Both Ends, Cylinder Switch Type: F59--Solid State, Gen.
Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: Rc, Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: J59W--Solid State, 2-color Indication, 2 Wire, 0.5M, Lead Wire or Pre-wired Connector: 5m Lead Wire, Number: -, Lock Unit Built-in Magnet: -, Lock Unit
Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: Rc, Stroke: 150mm, Option: Cushion at Both Ends, Cylinder Switch Type: F5P--Solid State, Gen.
Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 140mm, Thread: Rc, Stroke: 250mm, Option: Cushion at Both Ends, Cylinder Switch Type: F5PW--Solid State, 2-color Indication, 3 Wire PNP, 0.5M, Lead Wire or Pre-wired Connector: -, Number: -, Lock Unit Built-in Magnet: -, Lock Unit Switch
VDW Series Enter together in order, counting from station 1 on the D side.
250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure
Wiring Electrical entry Auto switch type Electrical entry from inside 3-wire D-F9P B Solid state switch D-F9 In-line 2-wire D-F9B 3-wire D-F9NW,D-F9PW In-line 2 color indication solid state switch D-F9 W 2-wire D-F9BW 3-wire D-F9NWV,D-F9PWV Perpendicular B 2-wire D-F9BWV Install auto switch as shown in figure below.
4.5 4.5 22 18 18 8 13 14 4.5 4.5 3.5 3.5 29 29 18 18 9 8 13 Reed auto switch D-A9V Solid state auto switch D-M9V D-M9WV D-F8 D A Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Potential malfunction may occur if a rectified AC with voltage rise (dv/dt) at zero crossing exceeds 40V /200 sec. Always establish a connection to a ground for safety.
Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
Controller CN3 Actuator cable Electric Actuator Motor CN2 5.3 CN4: Serial I/O connector (1) Connection with the teaching box Controller CN4 Teaching box (The 3m cable is provided.) 26 - (2) Connection with a PC Controller setting kit Controller Conversion unit 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200
(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.
Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw
300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.
Digital flow switch Air combination Spacer Spacer with bracket Pipe adapter PF3A801H AC30#-D Y300-D Y300T-D E300-#03-D PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). -20No.PF-OMY0005-A