SMC Corporation of America
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Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

We hope you found both the iii PneuAlpha iv PneuAlpha Guidelines for the safety of the user and protection of ECC-PNAL-PCS/WIN-E This manual provides information for the use of ECC-PNAL-PCS/WIN-E. The manual has been written to be used by trained and competent personnel.

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l l

9h, 8-0 counter bore deplh 7 Bore size 040, 5O/RSI Ora#-Lll D Widlh across tlats: K With locking mechanism r cancel cap/Rs ':O: tr-t ll lE ' Dimensions of lhe model with a cancel cap are the same as lhose shown in the above drawings. > t l U 9 I , o E l l 'Dimensions for the maximum snoqy aDsofpron LNore 4lThe rou shoG an e\tended rr ston tod (Nore 5r'or \tq acrrno, on" oLLl a rrgsd?

3 w t y q i o e u t y q i o e u w !0 !0 !9 Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread r !8 !4 !6 !7 !5 !1 !2 w t y q i o e !0 u @0 Meter-in type Meter-out type Component Parts No.

Trace the arrow mark from the intersection D to obtain the intersection E. 4. The intersection E is the dew point under pressure 102 psi (0.7 MPa) with an ambient temperature 86F (30C) and a relative humidity 60%. The value for E is 144F (62C). 5. Trace the intersection E upward, and trace from the intersection D leftward to obtain the intersection C. 6.

2 u y e i For Asia For North America For Europe For France Special r w !1 Replaceable Kits List Table 1 Contents Kit no. Bore size (mm) Description Code Opening angle 30 H e Switch holder y Proximity switch u Parallel pin i Sheet gasket !2 Cover cap screw 45 G 40 CKZT-S040 Note 1) T P Switch cassette 60 F 75 E 90 D q Stay o Spring washer !

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *

Material Description Description q w e r t y u i o !0 !

D e D E Effective thread MB Effective thread 13 f h 9 l 16 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot In the case of w/o air cushion, it comes with rubber bumper.

JS20, 32, 40, 63 Center of sphere M M U U D J F B E G P A R H (mm) Max. thread depth P Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) Weight (kg) M A B C D E F G H J Model JS10-4-070 JS16-5-080 8.5 0.5 17 0.01 14.4 M4 x 0.7 9.5 12 4 7 4.7 80 4 1.5 26 12 0.5 23 19 0.02 M5 x 0.8 13.5 16 6 10 5.8 210 5 2 34.5 JS20-8-125 JS32-10-125 15.5 0.5 29.9

(Fig. 1-2) w Bend the reinforcing plate on the nut (M3) side, as shown in Fig. 1-3. e Pass the clip of the switch holder (a) through the square hole in the side of the reinforcing plate that was not bent in step w. (Fig. 1-4 and Fig. 1-5) r Place the switch holder on the cylinder tube in the state of step e. t Wrap the band around the cylinder tube.

temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200 VAC, u Piping length: Shortest 5 With the pressure control

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

Eliminate the unnecessary parts. 1.10-13 Series CS1 Front Flange/CS1F Lube (CS1F), Non-lube (CS1FN), AIr-hydro (CS1FH) Long stroke With auto switch/CDS1F (mm) Stroke range (mm) W/o rod boot With rod boot Style Bore (mm) J FT FX FD S AL B E F FA KA M MM H A D EA FY FZ G K N P B C h ZZ e f l ZZ1 125 140 160 180 200 250 300 115 1/2 M30 X 1.5 145 75 40 145 190 100 230 M14 X 1.5 110 238 133 261