20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

NPN) C76 IC 5 V Grommet C73 B54 C73C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA H7NF 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Yes Connector 12 V 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC Grommet DIN terminal Diagnostic indication (2-color) 3-wire (NPN) 3-wire (PNP) IC 5 V, 12 V Grommet 12 V 2-wire Connector 3-wire (NPN) 2-wire

Precision Cylinder Series MTS

MTS 8, 12, 16, 20, 25, 32, 40 Precision Cylinder How to Order Port direction Bore size Nil P Standard piping type Axial piping type 8 8mm MTS 8 A90L 20 8 MTS 20 A90L 100 12 to 40 Bore size Number of auto switches Nil S 2 pcs. 1 pc. 12 16 20 25 32 40 12mm 16mm 20mm 25mm 32mm 40mm Auto switch type Without auto switch Nil Refer to the table below for auto switch part numbers.

Low Friction Cylinders Metal Seal Type

Bore size [mm] (Pressure receiving diameter) 4 6 10 16 20 Operating pressure range [MPa] Weight of moving parts [g] 4 8 24 62 103 Thrust control standard [N] 0.01 to 8 0.03 to 19 0.08 to 50 0.20 to 140 0.30 to 200 Stroke [mm] 0.001 to 0.7 10 (Except for moving parts weight) Features 3 (Metal Seal Type/Single Acting) /4, 6, 10, 16, 20 control range of 0.01 N to 200 N Application Examples

EXxx-OMN0029CN

EDS Enable (SC_MonSs) 1 Disable Enable (Inrush) 100 msec 2 Disable 0.1 ms 1.0 ms 1.0 ms 10 ms 20 ms 3 (Filter_T) 1.0 ms 15 ms 15 ms 100 ms 200 ms 4 (SigExt_T) Enable (SC_MonOp) 5 1 Disable Auto (SC_RstOp) 6 Manual Enable 7 (OC_Mon) 6 Disable Clear OFF 2 6 Hold 8 (Fault_MD) ForceON ON Clear OFF 2 3 6 Hold 9 (Idle_MD) ForceON ON ON Enable Val165000

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%