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Also, for long stroke operation involving vibration and impact, use of a side support is recommended even if the spacing value is within the allowable limits shown in the graph. 90 MY1C63 MY1C63 MY1C63 MY1C63 80 (1600) (1600) (1600) (1600) 70 MY1C50 MY1C50 MY1C50 MY1C50 l l 60 (1400) (1400) (1400) (1400) MY1C40 MY1C40 MY1C40 MY1C40 50 MY1C32 MY1C32 MY1C32 MY1C32 40 (1200) (1200) (1200) (1200

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 250 5.4 3.0 1.0 0.6 0.5 500 3.1 1.9 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance

visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Model VK Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1) (2) (3) Port size Max. operating cycle (cpm) Response time (ms) VZ Weight (kg) Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Plug-in Non plug-in VF 2 position 3 position Single 15 or less 0.18 1200

550 740 1200 12 23 31 49 23 31 49 215 415 560 880 415 560 880 3300 1 4 1 2 1.0 1.0 1.0 1.0 1.0 1.0 Water Air Oil 1.5 4200 5400 Steam 1.0 5900 32A 7300 40A 9200 50A Note) Weight of grommet type.

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Screw mount type Quick disconnect type High frequency: 1200 Hz Good followability and response to successive electrical signal input. Continuous operation possible. 50 L/min 80 W type Switching frequency: 1200 Hz The manifold base should be prepared by users.

) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

Air Dryer Series IDG Conditions: Inlet air temperature 25C, P1: Inlet air pressure IDG60L (Standard dew point: 40C), IDG60S (Standard dew point: 60C) IDG75 (Standard dew point: 20C), IDG75H (Standard dew point: 15C) P1 = 0.3 MPa 0.06 0.01 P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.5 MPa 0.008 0.04 P1 = 0.5 MPa P1 = 0.7 MPa 0.006 0.004 P1 = 0.7 MPa 0.02 0.002 0 400 800 1200

Performance Charts IDG100H P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.7MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate l/min (ANR) Note: F = (1.8 x C) + 32; 1MPa = 145psi; 1l/min = 0.0353SCFM 7 8 Series IDG Membrane Air Dryer Single Style/Standard Dew Point 40C (40F) Specifications How to Order 1l/min = 0.035SCFM IDG 50 L 03 Flow rate by size

Unit Configuration Examples XYZ axes YZ axes Xaxis Yaxis Zaxis 1 Triple Axis P&P Unit How to Order Combination LG 240Z A0 50 20 X L E G J ZB D C Y Axis type X X axis Stroke(mm) 100 10 Ball screw specifications Axis type Z axis Rolled ball screw(mm) 15, lead 20 900 1000 1100 1200 1300 1400 1500 Symbol C 90 A0 B0 C0 D0 E0 F0 Motor specifications Motor specifications Mitsubisi Electric Corporation

) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the value of y, z + A on the graph, please consult SMC.

Area: (800) 258-9200-www.stevenengineering.com Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS HA Inlet air temperature C Model IDFS6E IDFS8E IDFS11E AT 740 35 1200

0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750 psig (5.1 MPa) 1200

Required flow rate Recommended flow rate = Number of elements FGE 400 L/min or less 800 L/min or less 1200 L/min or less FGG [Recommended flow rate per one element] 400 L/min (Pressure drop 7 kPa to 8 kPa) When viscosity rate is equivalent to water.

Note 3) Meter-in type is black zinc chromate plated. 15-9-26 4 Speed Controller: Standard Type Elbow Type (Metal Body) Series AS Dimensions: AS-1200-M3, AS120-M5, AS220, 320, 420 Dimensions: AS1400-M3 AS1200-M3 AS120-M5 AS120-U10/32 (Hexagon width across flats) AS220, 320, 420 AS ASP (Hexagon width across flats) ASN AQ ASV AK ASS ASR ASF Dimensions Max. Min. Max. Min.

CAT.EX30-1 A Stainless Steel Heat Exchanger Type Air Dryer Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS Inlet air temperature C Model IDFS6E IDFS8E IDFS11E 740 35 1200

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS Inlet air temperature C Model IDFS6E IDFS8E IDFS11E 740 35 1200 1650