7ND9071en

Screw 306 1 Bed of Local User Interface (LUI) 307 3 Screw 308 2 Screw 311 1 Shaft 312 2 Screw 313 2 Cam disc 314 2 Screw 315 6 Terminal block 322 1 Proximity switch (D__) 323 2 Screw 346 1 or 2 Bushing (I__) 347 2 Inductive proximity sensor (I__) 348 1 Fastening plate 349 2 Screw 350 1 Washer 351 1 Screw 355 2 Microswitch (K0_, B06) 357 2 Spring washer (K0_, B06) 358 2 Screw (K0_, B06) 44

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 4 0.5 0.5 4 3 16 16 2 2 40 40 5 5 2 1 Pin no.

HRX-OM-X037

Fig. 2-2 Names of the parts (This drawing shows HRL200-A-40.) 2.2.1 HRL-W-40 (Water-cooled type) Fig. 2-2 Names of the parts (This drawing shows HRL100/200-W-40.) HRL Series 2.2 Name and Function of Parts 2-3 HRX-OM-X037 Chapter 2 Name and Function of Parts Table 2.2-1 Accessory list (1) Operation Manual 2 pcs. (English 1 pc.

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

KJ

3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

IZx-OMP0064

Ionizer . 1-2. Accessories . 1-3. Option . 2. Installation . 2-1. Installation of ionizer . 2-1-1. Selection of piping port size . 2-1-2. Distance for installation . 2-1-3. Mounting and installation of the bracket . 2-2. Installation of the external sensor. 2-3. Routing of cables . 2-4. Transition wiring of ionizer . 3. Descriptions and Functions of the Panel . 4.

HRL

One compressor controls 2 channels which realize the independent temperature control of 2 systems.

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

High Power Cylinder Series RHC

AS600 (258) AS420 (102) AS600 (258) AS600 (258) AS600 (258) AS800 (586) AS500 (123) 1-A 2-B 1-C 2-A 2-B 1-A 2-B 2-A 2-B 2-B 2-B 2-B 2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 20 8, 10 1/4 500 9.5 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 50 12, 16 1/4, 3/8 1000 19 63 Composed effective area So (mm2) Composed effective area So (mm2)

EX510

SS5Y3-42-02-C6 1 unit SY3140-5LOZ 2 units o Cable assembly for output entry. EX510-VW10S 1 pc. !0 Output unit . EX510-DYN3 1 unit !1 2 port solenoid valve . VX2120-02-5GS1 1 pc. Two branch connectors are attached to the manifold including the SI unit and two are attached to the input unit and the output unit respectively.

IDX-OM-X004

/ Compliance Requirements . i 5 Chapter 1 Name of each Parts 1 1 Name of each Parts . 1 1 Chapter 2 Transportation / Installation 2 1 Transportation . 2 1 2 2 Installation . 2 1 2 2 1 Location . 2 1 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Electric wiring . 2 3 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation

ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

ZQ-OM01301

ZQ-OM01301-A Vacuum Pump System Manifold ZZQ108A-S O C-A (1) (2) (3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 2) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 2) Select S for the Option Symbol (10). (4) Shipping condition (2) Vacuum pressure

Digital Flow Switch (Integrated display type)

R S16 N -2 to 5 -82No.PF-OMW0007-E 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.