Clean Room Rodless Cylinder Series CYP ø15, ø32 1

If the maximum operating pressure of 0.3 MPa for the clean rodless cylinder is exceeded, the magnetic coupling can be broken, causing a danger of malfunction or degradation of particulate generation characteristics, etc. 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller) 10

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

Digital Flow Switch Series PFA For Air Series PFW For Water

The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10). Output (OUT1) Indicator DOWN Button ( Button) Lights up when OUT1 is ON. UP Button ( Button) Use when decreasing a setting value. Use when increasing a setting value. MODE Button ( Button) SET Button ( Button) Use when changing a function. Use when selecting a function.

HRX-OM-R028

Only reading is available Reading and writing are available 5.3 Setting and checking HRSH Series 5-10 HRX-OM-R028 Chapter 5 Simple communication protocol function 5.4 Communication sequence Starts with a request message from the customers system (host), and finishes with a response message from the product (slave). This product operates as a slave. It does not send any requests.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-03 ASG521F-03 ASG620F-04 ASG621F-04 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1000 25 15 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 1500 Effective area (mm2) Effective area (mm2) 20 10, 12 10 08 1000 15 500 10 5 500 5 0 0 0 0 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) 2 Stainless Steel Speed Controller Series ASG Construction Elbow type

Dedicated Controller

MS-DOS is a registered trade mark of Microsoft Corporation. Pentium is a trade mark of Intel Corporation.

IDX-OM-V020

IDFA70-23-A IDFA80-23-A IDFA90-23-A Outlet air pressure dew point oC 10 Air flow capacity m3/h(ANR) 186 300 462 576 Outlet air temp. oC 10 Note1) The data for ANR is referring to the conditions of 20oC, 1atm. pressure & relative humidity of 65%.

VCA

D H J Assembly part no.

Sine Rodless Cylinder Series REA

Series REAL Size: 10, 15, 20, 25, 32, 40 To ensure a permanent path. When smoother operation is required, even with an eccentric load. Stable operation is possible even with an eccentric load, through the use of a ball bushing. Series REAH Size: 10, 15, 20, 25, 32 The use of a linear guide makes possible a large load, large moment and high precision.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

10 15 15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U Connector type I 13 Connector auto switch 26 20 (22) D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M L B + Stroke A + Stroke E J S Note) This drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.

IDX-OM-W026

1,770 R410A 2,088 2,090 (1) (2) IDF Series 6-1 6 1 IDX-OM-W026 6 6-3 IDF22E, IDF37E Guige Guige ( 10) Guige (10) (820) 17 4-13 (17) [] mm A B C D E F G H J K L M N P IDF22E R1 775 6001 IDF37E R11/2 855 6801 85 340 (698) (93) 46 25 290 623 (134) (405) 13 314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Ejector Valve Unit Series ZYY/ZYX 1

3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !0 o r t ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e ZL ZY ZQ ZF ZP !

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

3 Position Cylinder Series RZQ

M K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0

IDX-OM-W093

8 A 8.1 8.2 A (10) 8.3 8.4 IDF60-20-A IDF60-30-A IDF70-20-A IDF70-30-A IDF80-20-A IDF80-30-A IDF90-20-A IDF90-30-A 50Hz 2.3 4 5.8 7.1 3/min(ANR) m 60Hz 3.2 4.8 6.5 7.9 10 1) ANR 65% 2) IDF60/70/80/90 Series 8-1 IDX-OM-W093 A 8.5 IDF60/70/80/90 Series 8-2 IDX-OM-W093 C 9 C 9.1 9.2 1) 2) IDF60/70/80/90 Series 9-1 IDX-OM-W093 A IDF60/70/80/90 Series 9-2 IDX-OM-W093 L 10 L L

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

IDX-OM-U010

E D G F C P J Unit: mm M N H K O L Unit: mm Model Port Size A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161 405 681 71 46 12.5 330 704 355 126 94 IDFC70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFC80 R2 438 957 863 169 480 958 219 78 10 0 11.0 463 916 485 170 IDFC90 Anchor bolt location Hole diameter:13 Unit: mm IDFC80 IDFC90 IDFC60 745 (957) (Air dryer outside) (Air