5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FA5-20-051 1 pc. VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

NVEPA|VEFseies

PO Dimensions P O Installation PO Power Amp.: Series VEA Model / S pec ific ations . . . . P O H o w t o O r d e r . . . . . . . . . P @ Dimensions/ Handling Instructions . . . . . P@, @, @ External Connections P@, @ Features and Functions P@ Sample Applications . . .

VXR21/22/23

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)

NCA1

Stroke (In inches and hundredths) Mounting B BA BB BC F G Bore 500 600 800 Stroke (In inches and hundredths) Standard Oversized rod High temperature Low temperature Oversized W/ high temperature Oversized W/ low temperature Stainless steel piston rod L S R X D Note: Tie rod length varies by mounting style.

Ionizer

Static Neutralization Characteristics 1) Installation distance and discharge time (Discharge time from 1000 V to 100 V) High speed static neutralization cartridge Air purge: Yes Supply pressure: 0.02 MPa (1 L/min (ANR) per nozzle) Air purge: No 30 45 25 40 60 Hz 35 1 Hz Discharge time (s) Discharge time (s) 1 Hz 20 30 15 Hz 5 Hz 25 15 20 Sensing DC 10 15 Sensing DC 1 Hz/60 Hz 60 Hz 30 Hz

VKF300

W Z E Please inquire separately regarding applicable voltage.

5 Port Air Operated Valve

stations 2 to 20 stations 2 to 15 stations 2 to 10 stations Manifold base Weight: W[g] Stations: n W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550 Note) Supply pressure to 1(P) ports and exhaust pressure from R ports on both sides for 10 stations or more (5 stations or more for the VFA5000).

S070

DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) VZ VS VFN Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

Multistage Ejector Series ZL112/212 1

Front cover A w !0 Misc.

PSxx-OMV0008CN

0x0404 0 R/W dtL2 (OFF ) U16 0 Y OUT2 OFF 0.01 s 0x0x0BB8 (03000) 0.01 s 1030 0x0406 0 R/W FiL () U16 0 Y 5R.D. 0.1 1060 0x0424 0 R/W FSC () S16 0 Y -5050 -72No.PS-OMV0008CN-E () 1 3 dec hex 2 0Std 1dUAL(2 ) 2o1Lv(OUT1 ) 3o2Lv(OUT2 ) 4LinE(Line ) 5oFF() 1100 0x044C 0 R/W U8 0 Y 1101 0x044D 0 R/W Std U8 0 Y std 2 1102 0x044E 0 R/W U8 0 Y 2 2 1103 0x044F 0 R/W U8 1 Y 1820 0x071C

VQ7-6/7-8

Single (reverse pressure): VQ7-8-YZ-S-SC 154 56 (71) 82.5 71.5 154 49 (64) 49 (64) 82.5 56 (71) 31 (42) 31 (42) 2-7.5 Mounting hole 16 (20) (port A) 16 (20) (port B) R1 R2 P Manual override A B PB 12 (16) (11) 10 (22) 16 16 (23) 75 (86) 62 (72) 75 (86) 62 (72) 50 A Prewired connector (M12) (L approx. 500) 2-7.5 Mounting hole PA R2 R1 P A B 2-Rc1/8 49 (64) 49 (64) (20) 18 18 (20) 44 (58)

Electric Actuator Triple Axis P&P Unit

Ball screw allowable rotation X axis specifications in-line mount (side mount) 200 20 40 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 750 20 40 4000 Allowable rotation rpm 20 40 3000 High rigidity direct acting guide 2000 kg mm/s mm 30 1000 15 2000 50 1000 25 2000 100(75) 1000 50(37.5) 2000 1000 0.05 (897) 1) When axes are combined, select each axis considering

VXD21/22/23

L, Z S L, Z S Note ) Thread PB 1 32A 40A 50A AC Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Cylinder Speed Checker

s 0 to 999 times Minimum display unit 1 mm/s 0.01 s (0.00 to 99.99 s, 0.00 to 99.99 s) 0.1 s (100.0 to 999.9 s, 100.0 to 999.9 s) 1 time Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Measurement accuracy 20% or less 0.2 s or less Internal voltage drop 1.5 V or less (0.8 V or less at 10 mA) Leak current 100 A or less Operating time 1 ms or less

Turntable Cylinder Series MGT

S A93 MGT Table unit switch quantity Cylinder with turntable Table unit auto switch type S 1 pc.

VZ100/300/500

VV4Z1 05 20 1 VP VG Option Thread type 02 2 stations A port F: With foot bracket VP Nil Rc G NPT 00F 20 20 stations R port 00N S070 Rc NPTF 00T VQ P port Rc Bracket is not mounted.

V100

Lead wire length: 2000 mm V114-5LOZ-M5 SY100-68-A-20 Lead wire length: 300 mm (Standard) V114-5LPZ-M5 Standard With power saving circuit) 0.4 W 0.1 W 0 W 62 ms Grommet, L/M Plug Connector With indicator light (Z) Z N R Coil Symbol of connector assembly with protective cover Caution No part numbers of connector assembly with cover are needed to be indicated in this

KJ

KQ 2 H 05 S 34 M H With thread seal Nil None S With thread seal One-touch fittings D Applicable tubing O.D.

HRX-OM-Y098

-A-20 .