MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M4 x 0.7 Depth 6 2-M5 x 0.8 CX 9 5.5 17 21.5 52.5 53.5 D25 25 27 5.5 26 27 -X 206.5 6.5 16 17 5 NS 10 12.5 25 Data 14 42 + Stroke 56 + Stroke 4-M4 x 0.7 Depth 6 12 10 + Stroke (mm) Stroke (mm) NS LA LB LT J 5 58 20 10 4 10 58 20 4 10 15 30 68 4 20

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VAC (50/60 Hz) 200 to 230 VAC (50/60 Hz) Regeneration USB cable option Three phase 200 to 230 VAC (50/60 Hz) USB cable Analog monitor output RS-422 communication Electric actuator Supplied by customer Regeneration PLC option Power supply for I/O signal 24VDC Supplied by customer PLC Power supply for I/O signal 24VDC MR Configurator Setup software Electric actuator Battery (included) PC 56

Centering Unit

X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56

Booster Relay Series IL100

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

Floating Joint

Lightweight and Compact Type Floating Joint RoHS Compact Model Connection thread Shortened dimensions Overall length JT20 M8 x 1.25 12.3 mm 27.2 mm JT32 M10 x 1.25 13.0 mm 33.0 mm Overall length JT40 M14 x 1.5 19 mm 43.0 mm Reduced by19 mm 29 mm New New JT Series Workpiece Cylinder (JCM) JA Series Workpiece Cylinder (CM2) Max. 56% lighter 50 ga22 g (Compared to JA20) Size JA Series New NewJT

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT M Min. port size Weight (g) A D1 D2 L2 L1 Model Nylon Urethane KSL03-34S KSL03-32 9 14 17 23 23 29 56 64 8 10-32 UNF 20.5 22 16 2.5 5 32 3.5 10.4 3.5 12 21 1 8 12.7 23.5 21.1 KSL07-34S 14.29 17 1 8 1 4 25.5 22.1 4 8.6 13.2 8.6 1 4 23.5 14 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 26.5 30 31 37 38 25.5 1 8 25.6 29 18.5 6 15.2 21.6 14.9

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

with lock [kg] 0.4 (Incremental encoder)/0.7 (Absolute encoder) 534 Electric Actuator/High Rigidity Slider Type Ball Screw Drive 11-LEJS Series AC Servo Motor Clean Room Specication Dimensions: Ball Screw Drive 11-LEJS40 LEF Body mounting reference plane Note 2) 5H9 ( ) depth 6 +0.030 0 (160) 110 4 x M6 x 1 depth 10 LEJ 18 M4 x 0.7 depth 8 (F.G. terminal) 84 105 (3.1) LEL Motor cable (6) 56

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 44.5 L2 = 11.5n + 59 n: Stations (Max. 12 stations) Dimensions 12 182.5 197 225 235.5 11 171 185.5 212.5 223 10 159.5 174 200 210.5 9 148 162.5 187.5 198 8 136.5 151 175 185.5 7 125 139.5 162.5 173 6 113.5 128 150 160.5 5 102 116.5 137.5 148 4 90.5 105 125 135.5 3 79 93.5 125 135.5 2 67.5 82 112.5 123 1 56 70.5 100 110.5 L1 L2 L3 L4

Series AK1000

to 60 psig (0.014 to 0.4 MPa) AK9210 2 to 100 psig (0.014 to 0.7 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Leak rate Connections Supply pressure effect Installation Internal volume Wetted Parts Material S 316 SS 316 SS 316 SS Hastelloy C-22 PFA Wetted Parts Body Nozzle Poppet Diaphragm Seat 56

Manifold Regulator ARM1000/2000 Series

recommended, depending on the situation. 752 Manifold Regulator ARM1000/2000 Series Dimensions 14.5 (With pressure gauge) (Mounting hole) ARJ AR425 to 935 ARX (With pressure gauge) Pressure gauge (Option) AMR ARM ARM Pressure gauge (Option) ARP IR-A IN (Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

Stainless steel specification for use in corrosive environments, Available with PT or NPT ports, One-touch fittings, Meter-in and meter-out types easily determined by the flow direction symbol on the resin body, Threads with and without sealant are available as standard, SPEED CONTROLLER, ONE TOUCH, FLOW CONTROL, 56 lb

Stainless steel specification for use in corrosive environments, Available with PT or NPT ports, One-touch fittings, Meter-in and meter-out types easily determined by the flow direction symbol on the resin body, Threads with and without sealant are available as standard, Speed Controller, FLOW CONTROL, 56 lb

Tamper proof speed controller with one-touch fittings, Flow rate can be adjusted with a special tool, Extra protection against inadvertent operation, Elbow or universal style, Meter-in or meter-out control, Body sizes: M5, 1/8, 1/4, 3/8, 1/2, Various port and tube O.D. sizes in both inch and metric, Speed Controller, One Touch, FLOW CONTROL, 56 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), VALVE, CHEMICAL, BASE MOUNTED, CHEMICAL VALVE, 2 PORT, 56 lb

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Single acting, single rod, compact cylinder , Bore sizes *: 12, 16, 20, 25, 32, 40, 50, Standard stroke range *: 5, 10, 20 , Port threads: M *; Rc, NPT or G * , Auto switch capable, Compact Cylinder, CQ2-Z, COMPACT CYLINDER, 56 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, Speed Controller, FLOW CONTROL, 56 lb

Flat head screw driver adjustable speed controller with one-touch fittings, Flow rate can be adjusted with a flat head screw driver, Prevents inadvertent manual operation, Elbow style, Meter-in or meter-out control, Body sizes: M5, 1/8, 1/4, 3/8, 1/2, Various port sizes in both inch and metric, Speed Controller, One Touch, FLOW CONTROL, SVD, 56 lb

Made to Order: 56 [CE Explosion-proof Directive (ATEX): Category 3GD], Body Size: 10A (1/4, Handle-operated Type, Pressure Increase Ratio Twice), Thread Type: T (NPTF), Port Size: 02 (1/4), Option: GN [Pressure Gauge (2 pcs.), Silencer], Semi-standard: Z (Display Units for Product Nameplate & Pressure Gauge: psi)

Made to Order: 56 [CE Explosion-proof Directive (ATEX): Category 3GD], Body Size: 20A (3/8, Handle-operated Type), Thread Type: N (NPT - Made to Order), Port Size: 03 (3/8), Option: GN [Pressure Gauge (2 pcs.), Silencer], Semi-standard: Z (Display Units for Product Nameplate & Pressure Gauge: psi)