Air Filter

Semi-standard: 6 Semi-standard: 6C Piping port Piping port thread ty pe (5) Part No. thread ty pe (5) Part No. Rc Rc C2SF-6-A C2SF-6C-A G G NPT C2SF-6(Z)-A NPT C2SF-6C(Z)-A Option symbol Semi-standard symbol J 6J CJ 6CJ Semi-standard: J Semi-standard: CJ Piping port Piping port thread ty pe (5) Part No. thread ty pe (5) Part No.

Micro Mist Separator

Semi-standard: 6 Semi-standard: 6J Piping port Piping port thread ty pe (4) Part No. (4) Part No. thread ty pe Rc Rc C3SF-6J-A C3SF-6-A G G C3SFF-6J-A NPT C3SF-6(Z)-A NPT C3SFN-6J(Z)-A Option symbol Semi-standard symbol W 6W Semi-standard: W Piping port (4) Part No. thread ty pe Rc C3SF-W-D G NPT C3SF-W(Z)-D Appearance and part No.

25

7 units 6 units 7 units 8 units 8 units 4 units 5 units 5 units 4 units 6 units 6 units 7 units 7 units 3 units Wiring/Piping Connectable number of ionizers (IZS42) with transition wiring (without external sensor) Warning 1.

LX Series Compact Electric Actuators

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

MGG

7 8 9 10 11 12 13 40 and larger are the same as number 6.

Plug-in/Plug Lead: Single Unit

Note2) For thread standard, refer to page 2-6-39.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

for 6 Elbow top ported M5 threads Elbow bottom ported With One-touch fitting for 3.2 Elbow bottom ported With One-touch fitting for 4 Elbow bottom ported With One-touch fitting for 6 Elbow bottom ported M5 threads Elbow mixed port sizes Port size With One-touch fitting for 4 With One-touch fitting for 6 With One-touch fitting for 8 Mixed and with port plug Elbow top ported With One-touch

Series AK1000

Code psig/bar unit MPa unit No code 0 V3 1 2 10 40 No gauge port e e 4PL 5PC No pressure gauge (Connections: 1/4 inch NPT) Sample Order Number Port -30 in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa AK1410TS e q 6 6 6 6 w 6 6 6 6 r t qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-G59F 5 5 5.5 6 7 7.5 8 7.5 D-B5/B6 BA -04 BA -05 BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 1 station 2 stations 3 stations 4 stations 1 () SOL.A 14 () SOL.A 2 () 1 SOL.A 14 15 () 2 SOL.A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 5 stations 16 17 18 19 20 21 22 23 24 25 SOL.B 16 () SOL.A 4 () 6 stations SOL.B 17 () SOL.A 5 () 7 stations SOL.B 18 () SOL.A 6 () 8 stations SOL.B 19 () COM. 13 (+) Connector terminal no.

70pvpump

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. Operating Environment Maintenance Warning Warning 1.

AIR FILTER

Semi-standard 6 Semi-standard 6 Part no. Part no. C1SF-6(Z)-A AD17-6(Z)-A Note 2 Option Semi-standard Part no. Part no. C1SF-2(Z)-A AD17-2(Z)-A External appearance drawing and part no. Note 1) B in the table shows full dimensions of the product. Refer to 11. DIMENSIONS (P30). Note 2) Min. operating pressure is 0.1MPa. Note 3) "Z" of the part with no.

Lubricator

Note 1) Note 2) For nylon type (material: PA), add -6 to the end of the product number. Example: AL20P-080AS-6 Note 3) For the bumper retainer assembly and bumper seat retainer assembly for the metal bowl with level gauge, add -8 to the end of the product number. Example: AL30P-030AS-8 -9- 6. Bowl Assembly Specifications 6-1.

100

6 !5 !1 !4 Component Parts No.

S070

W with power saving circuit 6 150 (Lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 4-11-6 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Body ported S070C-G-32 Grommet type R1.1 2 7 7.2 V100 R1.1 Mounting screw (AXT632-106A-2) M2 x 0.4, thread depth 6 mm or more SY SYJ 150 (Lead wire AWG#26) 5 21 5.5 2 (OUT) port VK 5.5 4 4 11.5 9.5 VZ VT 1 (SUP) port 3 (EXH) port

SI Unit for Vacuum Manifold

: PCA-140180 4 Cable length (L) 4 1500 [mm] 5 3000 [mm] 6 5000 [mm] Item Specifications Pin No.

Electric Actuator / Low profile slider type

Eliminate these factors. 6 The table of the actuator with 1) Actuator is used vertically. Actuator cannot be used vertically.

Large Size Vacuum Module: Series ZR

Stations Port location R16 Arrangement (Right valve station which is looked from valve side is first station.) 01 1 Left side Right side R L B 06 6 Refer to (About individual spacer.)

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A #2 !0 !9 @0 @1 #1 A' Ball bushing bearing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 Slide bearing y Long stroke 100 @7 80, 100 View A-A Component Parts Component Parts Description No. Description No.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2