Lateral Mounting (Body through-hole) Lateral Mounting (Body tapped) Model MXH6 MXH10 MXH16 MXH20 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Maximum tightening torque (Nm) 2.5 5.1 5.1 8.1 Bolt M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 Vertical Mounting (Body
Model/Stroke Width at closing (mm) Width at opening (mm) Max. operating frequency Opening/Closing stroke (mm) Mass (g) Bore size (mm) Model (L1) (L2) (L2-L1) c.p.m MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 60 20 56 76 280 40 78 118 345 10 40 60 96 156 425 30
Model Bolt Proper tightening torque N.m L1 MGZ/MGZR20 MGZ/MGZR25 MGZ/MGZR32 MGZ/MGZR40 MGZ/MGZR50 MGZ/MGZR63 MGZ/MGZR80 L2 11 11 16 16 16 16 20 10 10 12 12 15 15 23 2.5 to 3.1 2.5 to 3.1 4.1 to 6.4 4.1 to 6.4 8.8 to 13.8 8.8 to 13.8 30.4 to 47.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 L2 L1 2.
(mm) 10 9 8 7 6 5 4 3 2 Manifold stations n L1 L2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 14-8-10 11 Compact Electro-pneumatic Regulator Series ITV0 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Air Supply Handling Caution 1.
L2 L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91
EX) VV5FR4-10-l1-l VV5FR4-10-l2-l Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. EX) VV5FRA4-10-061-03 1 pc. VFRA4111 5 pcs.
Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3
Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch P = 16 Common SUP. port 2-M5 x 0.8 Individual SUP. port Common pilot EXH. port VAC port Silencer dedicated for manifold VAC. port electrical entry (In the case of side entry/With plug at the bottom) Rc 1/8 Hexagon socket head cap plug (mm) L1
VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L2 L1 ZL Release flow adjusting screw ZY 8 P PE Exhaust part 2-3.5 ZQ 62.8 (Body mounting hole Note 1)) 3 75 Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U
l 0.437 hf20 0.75 o.749 0.34 1.32 o.25 3.41 1.06 %-16 0.88 1.37 0.74 15O l1%) o.437 o.75 0.749 o.38 1.56 o.25 3.3A 1.25 3a-16 0.8a 1.25 0.62 5.12 @ Air Cvlinder Stain]esJ Steel Cylinder Series NCM Single Acting Spring Return /Spring Extend slrc' DITENSIONS NC BO-OS NCilCO-OS F 1.69 1.56 *o T'ICMBO.OT |-1 rr"" o*"-\H @ slrc' Air Cvlinder Stainles5 Steel Cylinder Series NCM Non-RotatinCRod
8 lrg , L1 2.28 (58) 2.91 174) 3.54 (90) (06) 4.80 112.) 5.43 (38) 6.06 054) 6.69 (170) 086) t,n2) 8.58 (a8) 9.21 (234) 9.84 (250) 10.47 (266) 1110 1282) 11.73 (298) (3|4) 12.99 (330) 13.62 (346) L2 1.57 \40) 2.20 (561 2.43 (72) 3.,16 (88) 4.09 (ta) 4.72 0n) 036) 5.98 ,.152) 068) 7.24 (184) 7.87 8.50 (2oo) (26) 9.'13 1232) 9.76 \248) 10.39 l2u) 11.02 \2fi) 11.65 (296) 12.24 \312) 12.91 (328
CA2 ND hole H10 CS1 Axis d9 C76 C85 Material: Rolled steel Material: Brass Material: Iron C95 Applicable bore (mm) A1 L MM L1 Part no. Applicable bore (mm) Applicable bore (mm) d C C d Part no. B H Part no.
E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.
Lateral Mounting (Body through-hole) MX MTS l1 Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 12.7 MY M4 x 0.7 2.5 15.6 M4 x 0.7 2.5 20.6 CY When tightening the work on the table with bolts, it should be done while holding the table. If holding the body, it may cause more than allowable moment to the guide, leading to decrease in accuracy.
Monitoring L Logical operation equipment L1 Logical operation equipment Input signal I Input equipment O Output equipment Input signal I1 Input equipment O1 Output equipment Output signal Output signal Monitoring Cross monitoring Monitoring L2 Logical operation equipment Input signal I2 Input equipment O2 Output equipment OTE Output of test result TE Testing equipment Output signal Output
Part No. 40 50, 63 80 100 D H B C A A1 E1 L1 MM R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 +0.070 0 0.1 0.3 25.4 21 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 8 22 12 16 +0.070 0 0.1 0.3 74 M18 X 1.5 11 27 31.2 26 27 28 60 M18 X 1.5 15.5 20 12 16 +0.070 0 0.1 0.3 32 37.0 31 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 13 18 28 +0.084 0 0.1 0.3 39 16 41 47.3 105
Material: Free cutting sulfur steel Applicable bore size (mm) 40 50, 63 80 100 A A1 R1 U1 E1 L1 MM NX NDH10 Part no.
A A1 E1 L1 MM RR1 U1 NZ L NDH10 NX +0.002 0 0.25 -0.004 -0.012 -0.008 -0.016 -0.012 -0.020 -0.012 -0.020 -0.012 -0.020 -0.012 -0.020 -0.012 -0.020 +0.002 0 0.26 +0.008 +0 056(9/16") 056(9/16") 0.24 0.24 0.63 0.63 0.71 0.82 0.82 0.47 0.63 0.87 0.87 1.10 1.50 1.73 0.98 0.98 1.18 1.18 1.57 1.97 2.17 #8-32UNC 0.47 0.41 0.47 0.47 0.63 0.83 0.94 0.55 0.45 0.55 0.55 0.79 1.06 1.22 1.10 1.34 1.65
Mea Meay Nm 4.2 420 V mm/s 3-3 Sum of the Load Factors 1 + 2 + 2' = Applicable because 0.008 + 0.15 + 0.18 = 0.34 < 1 Use is possible if the sum of the load factors does not exceed 1. 1 + 2 < 1 218 Air Slide Table Series MXY Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Fig. (1) Fig. (2) Allowable Static Load: F(N) Pitch moment Yaw moment Roll moment F F L1