Electric Slide Tables

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z LECA6 LECP6 LEC-G LECP1 LECPA Connection of shield material [Robotic cable with lock and sensor for servo motor (24 VDC)] LE-CA--B LE CA 1 B Controller side Actuator side (Terminal no.)

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

P G P Table 2.

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM131-01-35 (R, B, G, Y) A VM151-01-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

Table of Contents

76 g 81 g Weight Without lead wire with connector 40 g 38 g 43 g 16-2-5 6 Series ZSE30/ISE30 Setting Pressure setting Press the button.

5-Port Solenoid Valve

Weight Valve model Weight [g] SY3A0R 90 Valve model Port size Weight [g] 2(B) port SY3A3R C4 91 C6 93 Valve model Weight [g] SY5A0R 94 Valve model Port size Weight [g] 2(B) port Symbol SY5A3R C4 118 C6 115 C8 121 2(B) Vacuum pad port Response Time SOL.b SOL.a Valve model Without light/surge voltage suppressor With light/surge voltage suppressor S/Z type R/U type SY3AlR 18 26 18 SY5AlR 27

Air Cylinder Series MB

Technical data 347 Series MB1K Standard Type Basic style: (B) G W V Port Cushion valve G 2 x P B MM Ee11 Width across flats C B Rod sectional view H1 MB B' Effective thread 2 x 4 x J 16 N ZZ + Stroke S + Stroke H A F N C B Cylinder tube sectional view B-B Stroke range Bore size (mm) Effective thread length Width across flats A C B E F G H1 MB J MM N P S V W H ZZ 32 40 50 63 80 100 32.5 38

VFR

06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

Table of Contents

HA AT (G) (B) (D) ID (H) AMG Purge air for dehumidification AFF AM Misc.

Modular F.R.L. Unit

G Note) Description With bracket With round pressure gauge Symbol Nil B G Note) With round pressure gauge Note) G46 type pressure gauge.

Basic type / Direct mount type Series CY3B/CY3R

x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) A 16.5 27.0 B 25.5 48.0 Model CYV15 CYV32 L B L B L A M1, 2, 3: Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft (mm) g: Gravitational acceleration [9.8 m/s2] M2 M3 M1 m x g m x g m x g Guide shaft mounting surface Central axis of guide

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

MY1

G D Za -X 4-MM 20E1 E1 E4 E4 E3 E3 C E2 E2 F B Data G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2-LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) A 110 131 B 110 130 C 55 65 D 70 80 F 126 149 G H 37 37 Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 90 100 J Mounting direction (1) Mounting

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

Air Cylinder

LD + Stroke WF c + Adjustable Range 2-EE (NPTF) D Across Flats Stroke DD KK AA KK EA MM B b E/2 MM B TN A C G G 4-NT ND Deep K SD + Stroke R E XT ZZ + 2 x Stroke + Adjustable Range (A:1", B:2") (in) c KK R G A NT K ZZ DD Bore (in) C ND TN AA EA d D B MM WF Y LD P SD b E EE 1.25 7/16-20 1.43 1.26 3/4 1/4-20 9/32 6.58 1/4-28 150 (1.5") 3/8 9/32 5/8 2.02 0.3 1.80 9/16 1 1/8 5/8 1 1.71 3.78

Air Cylinder

Grease pack part number: GR-S-010 (10 g) 179 CM2 Series Basic (Double-side Bossed) (B) CM2B Bore size Stroke Z G G 2 x NN 2 x P (Rc, NPT, G) H2 H1 Width across flats B2 Width across flats B1 B1 I 2 x Eh8 NA D Effective thread length 2 x FL Width across flats KA MM AL A H K F F NA S + Stroke ZZ + Stroke Cushion needle With rod boot With air cushion (Width across flats 1.5) 45 l WA WA 8 8

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

Made to Order

-XC88 -XC89 Basic: MBB MB Port V W Cushion valve 2 x Rc P G G E MM Width across flats B1 Width across flats KA Fd D E B C A AL H1 MB N B C MA N 2 x 4 x J K H F ZZ + Stroke S + Stroke Dimensions (mm) Bore size (mm) 32 40 50 63 80 100 A AL B B1 C D E F G H H1 J K KA MA Fd MB MM N P S V W ZZ 22 30 35 35 40 40 28 33 39.5 39.5 44.5 54 4 4 4 4 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x

0.4

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 one-touch fitting R R G 1/2 61.5 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A