Model: 0 to -101kPa, Piping: ø1/4" One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: NON + T, Made to Order: -

Model: -100 to 100kPa, Piping: ø4, ø5/32" One-touch Fitting, Straight Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: NON + T, Made to Order: -

Model: -100 to 100kPa, Piping: ø6 One-touch Fitting, Straight Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: NON + T, Made to Order: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: None, Option 3: Operation Manual, Calibration Certificate

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: None, Option 3: K (Operation Manual, Calibration Certificate)

Model: 0 to -101kPa, Piping: NPT 1/8, M5 Female, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: ø4, ø5/32" One-touch Fitting, Straight Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: NON + T, Made to Order: -

Model: 0 to -101kPa, Piping: ø4, ø5/32" One-touch Fitting, Straight Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: NON + T, Made to Order: -

Model: -100 to 100kPa, Piping: ø6 One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: NON + T, Made to Order: -

Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: R 1/8, Option 1: -, Option 2: -, Option 3: -

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: 01 (R 1/8)

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

•

Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

MGC

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

PSE200

ZS-26-E (4 pcs. per set) Connector 3 Multi-channel Controller Series PSE200 Specifications Model PSE200 NPN open collector PSE201 PNP open collector Output specification 12 to 24VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage 55mA or less (Current consumption for sensor is not included.)

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa