44 M L M 17 17 33.6 7.6 17 17 37 8.5 22 22 39.4 9.3 Union Tee: KFG2T Applicable tubing size (mm) O.D.
H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.
ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) A H E F (Through) N N (I ) (L) (Z) (G) C CX2 NN CXW A B ZZ C D E M F G H I J K L N 2 x M4 x 0.7 with thread depth 6 2 x M4 x 0.7 with thread depth 6 2 x M5 x 0.8 with thread depth 7.5 2 x M5 x 0.8 with thread depth 7.5 NN Q R T U 2 x M5 x 0.8 with thread depth 4 2 x M5 x 0.8 with thread depth 4 2 x M5 x 0.8 with thread depth 4
Applicable shaft types: K, T Equal dimensions are indicated by the same marker. 20L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M L1 = L1 Q1 = M L1= Q1 = M K axis L1 T axis Q1 Q1 (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x1.25 M10 x 1.5 Rc 1/8 Q1 (mm) 20 30 10 15 40 J axis Z axis (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 2.5 2.5 3.3 2.5 3.3 4.2 5
H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.
1/8 3.2 H 100 VAC K L P Q R S T U 5/32 3/8 4 J 110 VAC 7/32 5.6 2 Size 2 Single K 200 VAC Unit 3/32 2.4 1/8 N.C.
Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.
f J J J IN OUT IN OUT 2 x M Depth 5 H 2 x M Depth 5 G A H i G A 2 x P Port size B1 B b B1 B 2 x P Port size DIN terminal Cable 6 to 12 G1/2 Q F S Bracket mounting hole dimensions D a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) (44) 31.5 6.5 R C E 10.5 IN OUT 2 x M Depth 5 G A H 2 x P Port size B1 B (mm) A B B1 C D E F G Port size P H J M Model 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40
t r w r w e e VXF26C<t y t w w r r e q e q VXF26D<t t y r w r w e q e q Component Parts Component Parts No.
E H J L N M W (T) X Min. port size LQ1F41 12 28 30 53 60 21 33.1 34 12 10 9.4 LQ1F42 10 58 7.4 LQ1F51 19 32 36 58 65.2 26 40 41 14 16 15 LQ1F52 12 63.2 9.4 LQ1F61 25 39.5 36 69 81.5 49 51 14 22.5 21.2 LQ1F62 19 15 3 SMC (W) (M) N J SMC 3/4 19 X H (E) (T) Class 4, 5 JIS 10K flange W Note) H Inch sizes Model Applicable tubing O.D.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.
4 VVQC1000-T0-1 Terminal block box housing assembly T kit VVQC1000-L25-0-1 L kit with 0.6 m lead wire !5 VVQC1000-L25-1-1 Lead wire housing assembly L kit with 1.5 m lead wire VVQC1000-L25-2-1 L kit with 3.0 m lead wire !6 VVQC1000-M26-1 Circular connector housing assembly M kit, 26 pins 586 VQC1000/2000 Series Plug-in Unit Base Mounted Manifold Assembly Part No.
Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4
(mm) Connection thread Rc Model M Weight (g) Mounting hole T (M) L2 L1 Nylon Urethane Mounting plate thickness 7 mm or less KGE04-01 1 8 14 16 16 35 11 15 11 15 17 7.5 13 27.5 31 28 31.5 33.5 27.5 33 M12 x 1 13 4 5.6 4 14 1 4 KGE04-02 17 Connection thread 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 30 Applicable tubing 6 M14 x 1 15 17 13.1 10.4 17 19 29 26.1 18.0 28 27 48 17 1
K Approx. 300 C M F (P.C.D) D B IN OUT 8-18 L E H A DIN terminal: D Conduit: C Approx. 280 N (N) J J (44) G 1/2 M M G 1/2 Cable 6 to 12 (Q) Conduit terminal: T J (N) 32 25 G 1/2 M (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (AC/Class B coil) Model M 93 N 33 36 36 M 88 N 51.5 54 54 M 89 N 68.5 71 71 Q 56.5 59 59 M 88 N 103.5 Q 72.5 75 75 Normally closed VXD2272 VXD2382
each Shock resistance Endurance 10 G; X, Y, Z directions, 3 times each CE2 Impact resistance 250 g or less Weight ML2B 3-point Preset Counter/Dimensions C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-31 Series CEU Extension Cable How to Order CE1-R Cable length Suffix 05 10 15 20 Extension cable Nil 5 m 10 m Extension cable & connector C 15 m 20 m Extension cable CE1R Stroke reading cylinder
each Shock resistance Endurance 10 G; X, Y, Z directions, 3 times each CE2 Impact resistance 250 g or less Weight ML2B 3-point Preset Counter/Dimensions C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-31 31 Series CEU Extension Cable How to Order CE1-R Cable length Suffix 05 10 15 20 Extension cable Nil 5 m 10 m Extension cable & connector C 15 m 20 m Extension cable CE1R Stroke reading cylinder
Local Area: (800) 258-9200-www.stevenengineering.com 4-FD RHC MK(2) FT FV M RS Q G FX FL RS H A 4-O (Special cap bolt) A + Stroke FZ FG RZQ Head side flange style: MI W S CE1G Bore size Stroke 4-FD CEP1 CE1 FT FV M CE2 FL FX ML2B A + Stroke 4-O (Special cap bolt) FZ FG C J G5-S Double clevis style: CE1D Bore size Stroke CV MVGQ 4-O CC CX +0.4 +0.2 CZ 0.1 0.3 RB J CD hole H10 Shaft d9 CU T
How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3