Model Av x 106 m2 C [dm3/(sbar)] N.C. 0.96 Cv 0.40 b 0.14 Cv converted 0.04 1 0.04 VDW10 M5 1.6 0.07 0.07 1.7 0.25 0.30 1.6 0.09 0.08 1.9 0.45 0.31 M5 1/8 (6A) VDW20 2.3 0.18 0.18 4.3 0.45 0.58 3.2 0.33 0.30 7.2 0.38 1.2 2 0.16 0.16 3.8 0.52 0.52 1/8 (6A) 1/4 (8A) VDW30 3 0.30 0.28 6.7 0.52 1.0 4 0.46 0.44 11 0.49 1.5 244
CUJB10-4 -6 -8 -10 -15 -20 M2.5 x 21L M2.5 x 23L M2.5 x 25L M2.5 x 27L M3 x 22L M3 x 24L M3 x 26L M3 x 28L M3 x 33L M3 x 22L M3 x 24L M3 x 26L M3 x 28L M3 x 33L M3 x 38L M3 x 22L M3 x 24L M3 x 26L M3 x 28L M3 x 33L M3 x 38L 4 4 14 M2.5 x 14L 5 5 18 M3 x 18L 5 5 18 M3 x 18L 5 5 18 M3 x 18L For axial mounting With Auto Switch For side mounting A B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33
-15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 7-2-6 6 Mini-free Mount Cylinder Series CUJ Clean Series How to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Nil 2 pcs. 1 pc.
5 20: M5 X 0.8 X 6 25, 32: M6 X 1 X 6 40: M8 X 1.25 X 8 Chrome-molybdenum steel Nickel plated Hexagon socket head screw 20, 25: M5 X 0.8 X 6 32, 40: M6 X 1 X 8 Hexagon socket head set screw Nickel plated Chrome-molybdenum steel !6 Name plate !7 Special resin Cushion seal !8 Replacement Parts Bore size (mm)/Part No. Description No.
Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.
Spring 134313 o AWM Dimensions AWD K A Model ARJ1020F-M5-04 ARJ1020F-M5-06 21 22 B 10.4 12.8 C 4 6 D E F 10.6 (Width across flats: 10) G H J Caution 17.2 M5 X 0.8 6 3.5 15.5 50 ITV qRelease the lock to adjust the pressure. After the adjustment, engage the lock. Failure to observe this procedure could damage the handle or cause the secondary pressure to fluctuate.
30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002
Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32
Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32
Surge voltage suppressor (for D YS, D YZ) 2 locations 70 52 Light (for D YZ) 24.5 18 25.5 Bracket (Option) Pg7 18 83 Breathing hole (6.2) 48.6 42.2 90.4 41.9 Max.10 39.6 Manual override part 19.9 IN OUT OUT 2 1 IN EXH 3 EXH 40 2 x M5 x 0.8 thread depth 9 (for bracket mounting) Applicable cable O.D. 3.5 to 7 (24.5) 64.3 56.8 Details of manual override part (for manual operation) 38.5 7 Type
Attach the ionizer body and brackets with M5 screws. (5) Adjust the angle of the ionizer body to make the static neutralization effective, and fix with the rotating set screws (M5) of each bracket. (6) Make sure to ground with the ground resistance of 100 ohms or less by connecting DC1(-) lead wire [blue] M5 M5 screws of the power supply cable.
Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-
M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note)M5size:S(withseal)isnotnecessary. 611 A
IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 1046
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)
Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -
~ \'\1 ~/I I~ j 'l OI :A(PT)Y. T1 NPTF Ya PipIng port / I M5XO 8 "eplh 5/ I 8 ~~ With Bracket A I 30 ~ o ~ I I ::1 ';!1 rl .J '1'1.. I ~J' 20 24.5 zs -~ -eli Bracket View A Panel Mount Type Side dimensions for 418 panel mount type 0 40 21.2 , 6 8.5 36.0-5 >, D 0 . 1,16o;~1 ~ \ z 5-22-0 1 ZS-22-02 Thickness of the panel is 1 to 3.2mm.
A Emitter cartridge retaining screw Emitter Cartridge (M3 x 0.5 L=12) Emitters (8 emitters are mounted circularly) Caution Do not touch the emitters during cleaning. Using the cleaning kit, saturate the felt with industrial alcohol, insert it into the emitters and rotate several times to clean.
IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B C D E F G H I J A , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3-M5 x 0.8 x depth 6 3-M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 14-13-5
Supply valve (N.O.), and release valve Air operated valve (supply valve), Port size connection M3 x 0.5 Air operated valve (supply valve), Port size connection M5 x 0.8 Air operated valve (supply/release valve), Port size connection M3 x 0.5 Air operated valve (supply/release valve), Port size connection M5 x 0.8 Without valve Nil B Non-locking push type Locking slotted type Light/Surge voltage