10

Bore size [mm] Dd9 L l m d Part no.

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

diameter [m] Particle diameter [m] 11-LEJS63/Ball Screw Drive Speed 600 mm/s Speed 1200 mm/s 10 10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 10 10 ISO Class 5 30 L/min (ANR) 1000 1000 ISO Class 4 ISO Class 4 90 L/min (ANR)

Booster Regulator/Air Tank

bore size L [mm]: Cylinder stroke W [mm/s]: Cylinder operating speed C [pc.]: Number of cylinders Tc [s]: Cylinder operating time Ts [s]: Cylinder stop time P1 [MPa]: Inlet pressure P2 [MPa] Note 1): Necessary supply pressure to cylinder Other conditions: Q [L/min (ANR)]: Required air flow rate Qb [L/min (ANR)]: Outlet air flow rate of booster regulator Tc [s]: Cylinder operating time K:

53

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

MB

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13 13 l + Stroke 9 l 9 A K f N N f K A ZZ + 2 Stroke S + Stroke h + Stroke h Without Air Cushion S ZZ Stroke range Width across flats Bore (mm) Eff. thread length C B A D Ee11 F G H MA MB J K MM N P V W S ZZ 32 40 50 63 80 100 125 46 52 65 75 95 114 136 32.5 38 46.5 56.5 72 89 110 12 16 20 20 25 30 32 30 35 40 45 45 55

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

JAS

JAS Series How to Order Port size M3 M3 x 0.5 M5 M5 x 0.8 U10 10-32UNF JAS L E A 04 M5 JAS L E A S 04 01 Seal method Type L Elbow Nil Without sealant S With sealant Control type1 Port size E Meter-out S Meter-in 01 1/8 1 Meter-out and meter-in types can be visually identified by the color of the knob.

2/3 Port Valve

(No need to add options "S" and "L".)

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

(between lead wire and case) Indication light Lights when ON Operating time 1ms or less Enclosure IEC529 standard IP67 (JISC0920) Watertight construction Impact resistance 1000m/s[102G] For 3 meter lead wire, L is added to end of part number.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

2 x 9 counterbore M5 x 0.8 effective depth 7 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x M6 x 1.0 effective depth 10 Note 2) 2 x 5.4 through 47 25.5 10 36 1 Flat washer 8 10 7 7 25.5 39.5 + Stroke 4.5 36 44 + Stroke Lead wire minimum bending radius 10 Auto switch 25 19 5.5 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x 9 counterbore M6 x 1.0 effective depth

HEC_W-E

External sensor sampling cycle setting mode E x t e r n a l S e n s o r S a m p l i n g C y c l e M O D E < 1 8 0 s e c Setting range: 10 to 999sec Min. increment: 1sec Indicated content: External sensor sampling cycle (Ex.: 180sec) Function: Sets sampling cycle of external sensor for learning control or external tune control. 8-6 Operation 5.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Clean Gas Filter

SFB104-M5 0.1 q e t r w Max. flow rate line Inlet pressure Pressure drop MPa 0.3 MPa 0.01 0.1 MPa 0.7 MPa 0.001 0.5 MPa IN 0.0001 100 0.1 1 10 y Flow rate L/min (ANR) Description No.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

;'*'*lffi:';l .-^t /#!3 sL | ,..,9!!i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e !

-fl Seies

;'*'*lffi:';l .-^t /#!3 sL | ,..,9!!i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e !

HRX-OM-W002

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

10

Absorbed Energy Max. absorbed energy (J) Collision speed (m/s) Model 1 2 3 4 5 10 20 30 40 50 60 70 80 Soft type RJ0604 0.05 to 1 0.5 H : 0.05 to 2/L : 0.05 to 1 RJ0806H/L 1 H : 0.05 to 2/L : 0.05 to 1 RJ1007H/L 3 H : 0.05 to 2/L : 0.05 to 1 RJ1412H/L 10 H : 0.05 to 2/L : 0.05 to 1 RJ2015H/L 30 H : 0.05 to 1.5/L : 0.05 to 1 RJ2725H/L 70 Short stroke type RJ0805 0.05 to 1 0.5 RJ1006 0.05 to

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

CC

0 30 86 3 28 45 53 88 86 64 88 104 CC 1/2 7 13 2 1 32 120 5 33 65 61 123 116 92 125 139 11/4 3/4 7 20 2 46 185 0 29 93 60 183 180 144 185 202.5 L dimension 600 700 800 Effective oil level stroke (mm) 50 100 200 300 400 500 CCT63-l 228.5 278.5 378.5 503.5 603.5 728.5 s s s CCT100-l 286 386 511 611 736 836 s s s CCT160-l 399 524 624 749 849 949 1049 s s * Hexagon socket head cap screw is used