MGP

l (mm) 0.5 0.3 0.4 40 to 124 stroke 0.2 30 20 0.1 P=0.5MPa 10 100 50 20 30 40 200 25 20 10 Eccentric distance l (mm) Load weight m (kg) 2 3 4 5 16 12 Over 75 stroke 1 100 200 0.2 0.3 0.4 0.5 P=0.5MPa 80 100 63 0.1 10 100 50 50 200 20 30 40 50 40 Eccentric distance l (mm) Load weight m (kg) 40 30 32 20 Over 125 stroke 20 25 P=0.5MPa 10 20 25 10 4 5 20 16 Load weight m (kg) 2 3 4 5 3 16 12

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [L] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Time [s] T1 T2 T3 T4 T1 = V/a1 = 1500/3000 = 0.5 [s], T3 = V/a2 = 1500/3000 = 0.5 [s] T = T1 + T2 + T3 + T4 [s] L : Stroke [mm] (Operating condition) V : Speed [mm/s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

LJ1H

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

2 Phase Stepper Motor/Without Motor Brake Series LXS

70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

G r a p h i c O p e r a t i o n Te r m i n a l Actuator cable* Pages 566, 581 Controller type Standard cable Robotic cable LECP6 (Step data input type) LE-CP-m-S LE-CP-m LECA6 (Step data input type) LE-CA-m LECP1 (Programless type) LE-CP-m-S LE-CP-m The * mark: Can be included in the How to Order for the actuator.

Integrated Controller

T4 = 0.15 [s] T2 = [s] L 0.5 V (T1 + T3) V The cycle time can be found as follows.

MY2

Load weight kg MY2HT25 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s 1000 L unit 500 400 300 Air cushion 200 100 1 2 3 4 5 10 20 50 40 30 m1 max. m1, m2, m3 max. Load weight kg MY2HT40 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s L unit 1000 500 400 300 Air cushion 200 1003 5 10 20 30 50 100 200 m1, m2, m3 max.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

MY2C16 MY2HT16 Horizontal impact: P = 0.5 MPa Horizontal impact: P = 0.5 MPa 1500 2000 2000 1500 H unit Impact speed mm/s Impact speed mm/s 1000 1000 L unit 500 400 300 400 500 L unit 300 Air cushion Air cushion 200 200 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.

CNA

when pressurized GA Rc BQ Rc P GD GC Rod side cylinder port Plug with breathing hole GR GL GL1 Rc P CD hole H10 Shaft d9 Head side cylinder port Width across flats KA GB 4-J Q With rod boot Width across flats B1 MM W C D E e V H1 AL A K F 8 f l T N U BN h + l CX S + Stroke Z + Stroke ZZ + Stroke L RR H Z + l + Stroke CZ ZZ + l + Stroke B Bore size (mm) Stroke range (mm) J K KA A AL B B1

CNA

20With rod boot TDe8 Width across flats B1 GB 4-J Z + 1/2 stroke Z + l + 1/2 stroke MM MM Data W V TY D e D E H1 AL AL A A F BN TT K K 8 f l N C h + l B ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8

LEY-OM007

a <> ABSINC ABS() / / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00

CM2

CM2 L 32 F S 150 Standard DM2 C L 32 F S C73 150 With auto switch Number of auto switches S n 2 1 n Action Air cylinder with auto switch Single acting/ Spring return Single acting/ Spring extend S Bore size 20mm 25mm 32mm 40mm 20 25 32 40 T Auto switch Without auto switch (Built-in magnet) * Refer to the table below for selecting applicable auto switches.

2/3 Port Valve

=2.4): P 0.08MPa VNH133AB(Cv=1.7): P 0.16MPa VNH413AB(Cv=1.4): P 0.23MPa VNH313AB(Cv=1.0): P 0.45MPa VNH213AB(Cv=0.7): P 0.9MPa VNH113AB(Cv=0.4): P 0.8MPa Calculation by Cv factor Q=14.2 Cv .l/min 10.2P G Calculation by effective area Q=0.8 S .l/min 10.2P G (Symbol) Q : Flow rate(l/min) P : Pressure differential P1-P2(MPa) P1 : Primary pressure(MPa) P2

Thermo-chiller

(Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

MG

distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 300 300 200 200 80 80 100 100 Load weight m (kg) Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-52 MGPS50/80 (5) l = 50 mm, V = 200 mm/s (6) l = 100 mm, V = 200 mm/s 100 80 50 80 80 80 40 Load weight m (kg) 30 50

New

B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Consult P/A.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

GA GC GD GL GR Plug cap with breathing hole (For spring locking) GL LOCK FREE 4 x J P (Rc, NPT) Head side cylinder port Width across flats KA PL PG LZ PH GB Width across flats B1 MM 2 x Cushion valve CDH10 PW With rod boot D E C B F K A AL H1 l 10.2 U N BN CX C B ZZ + l + Stroke Z + l + Stroke h + l L RR ZZ + Stroke Z + Stroke H S + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

lead wire bending radius 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch D-A7/A8 K M E S L B A + Stroke L + Stroke J Rod End Male Thread Rod end male thread With auto switch 50 st or less 55 to 75 80 to 100 A1 Without auto switch Q 2-P Q Bore size