Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Fluoropolymer Piping Equipment

P0.01MPa 2 0 2 4 6 8 10 0 Number of needle rotations 939 B LVN Series Construction t r w e q With reducer i y u Part lists Material Description No.

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

1 Holder assembly replacement screw y Tubing i Holder assembly r Insert pin assembly u Fitting nut Place the insert bushing t on the insert pin assembly r. t Insert bushing 2 !

VM

5 Brass Valve seat (B) Head cover r Spool/sleeve t Polyacetal End cover !6 NBR, Brass Valve y Brass Piston guide !7 Stainless steel Return spring u Brass Piston guide for end cover !8 Stainless steel Return spring i Polyacetal Piston !9 Stainless steel Valve spring o Polyacetal Piston for end cover @0 NBR Mini Y packing !0 Polyacetal Guide bushing NBR Mini Y packing @1 !

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Soft Start-up Valve

Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D 2 x W 4 x W Y V Y U H H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2

Vacuum Unit

How to Order Valve Manifold Assembly r Option2 (For details on the Function/Application, refer to page 42.) Symbol Type Selectable option for manifold y (Refer to page 16.)

High Purity Fluoropolymer

After placing the tubing r in the holder assembly y, push it onto the insert bushing e until it stops and clamp it with the knob u. When tightening the tube r with the knob u, maintain uniform clearance on both sides of the holder. 3 q Lever y Holder assembly Caution r Tubing G When the tubing r is curved, straighten it out before using it.

CC-Link-E

Pl ease i nqui re of t he CCLi nk soci et y about ot her connect i on and det ai l s. M ai nt enance and i nspect i on Turn of f t he pow er suppl y, st op t he suppl i ed ai r, exhaust t he resi dual com pressed ai r and veri f y t he rel ease of ai r bef ore perf orm i ng m ai nt enance.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

VQ7-6/7-8

o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

from both sides of R port.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4 r t y u i !5 !6 No.

Electric Actuator with Integrated Guide

R 200/230V AC (50/60Hz) 2 Y 0 Without motor Proximity switch (A contact) 1 pc., Proximity switch rail 1 pc. Proximity switch (A contact) 2 pcs., Proximity switch rail 1 pc. Motor/switch entry direction Proximity switch (B contact) 2 pcs., Proximity switch rail 1 pc.

MGC

-R (Ball busing bearing type) Deflection Y (mm) Deflection Y (mm) St: Stroke (mm) Allowable end load F (N) MGCL50Stroke -R (Ball busing bearing type) St: Stroke (mm) Allowable end load F (N) 8-22-9 10 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type) (Slide bearing type) Deflection Y (mm) Deflection

High Vacuum Angle Valve

5 Plate assembly (Maintenance parts)1 i Bellows holder (Material: Stainless steel 304) r Exterior seal (Maintenance part)1 u Bellows assembly (Maintenance parts)1 Port 3(R) (Exhaust port) (Including y, i) Bellows (Material: Stainless steel 316L) !

Series VQ Metal Seal/Rubber Seal Body Ported

VQ VQ4 Note) R block valve is mounted in the blocking position when ordering an individual EXH spacer incorporated with a manifold. When separately ordering an individual EXH spacer, separately order a R block valve. VQZ P R PR 1 2 0 1 P R PR Block valve VQD VQ 4 --Valve No.

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

REA/REB

9 u o i @7 @9 @5 @6 @4 e y r !3 q #0 !1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.