Fieldbus System

EtherNet/IPTM EtherNet/IPTM EX600 q EX600 w EX600 e EX600 r EX600 q EX600 w EX600 e EX600 r Linear type Device level ring (DLR) type One or more ring supervisors are required.

VM

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

Air Fittings & Tubing

H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.

Title not found

Body oplrcn combnalon is Nominalbore size Aclualion I Nol ava labe vrthoul auto v tch l Nol avarlabe wth Double od (V/) r Nol availabe w h spnnq reLurn o.sp.ing enend. .r !

Compressed Air Cleaning Filter Series

JIS B2401G35 3 pcs. 56 Series AMF Dimensions AMF150C to 350C P Q T S R F E D N Bracket L U (Accessory) O K G M V W J B OUT IN C I A Maintenance space (mm) A Model Port size Bracket related dimensions B C D E F G I 98.5 N 56 J 20 K 5 U 6 V 6 L 12 M 6 W 10 O 35 P 70 Q 26 R 54 S 4.5 T 1.6 AMF150C AMF250C AMF350C 10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

LEC-OM07605CN

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R.

High-precision Digital Pressure Switch ( compatible)

0x071F 0 R/W Line name 4th letter U8 0 Y 1824 0x0720 0 R/W Line name Left side bot U8 0 Y 1825 0x0721 0 R/W Line name Centre bot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 1826 0x0722 0 R/W Line name Right side bot U8 0 Y drE (Selection of display value resolution) 0: Normal resolution 1: Lower resolution (1/10) Setting of display value resolution 1110 0x0456 0 R/W U8 0 Y 1140 0x0474 0 R/W Cut

High-precision Digital Pressure Switch ( compatible)

0x071F 0 R/W Line name 4th letter U8 0 Y 1824 0x0720 0 R/W Line name Left side bot U8 0 Y 1825 0x0721 0 R/W Line name Centre bot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 1826 0x0722 0 R/W Line name Right side bot U8 0 Y drE (Selection of display value resolution) 0: Normal resolution 1: Lower resolution (1/10) Setting of display value resolution 1110 0x0456 0 R/W U8 0 Y 1140 0x0474 0 R/W Cut

Digital Pressure Switch ( compatible)

2nd letter Y U8 0 Refer to Figure "2nd to 4th letter (7seg) of Line name communication data". 0x071E (1822) 0 R/W Line name 3rd letter Y U8 0 Lower level screen 0x071F (1823) 0 R/W Line name 4th letter Y U8 0 0x0720 (1824) 0 R/W Line name Left side bot Y U8 0 0: OFF (dot OFF) 1: ON (dot ON) 0x0721 (1825) 0 R/W Line name Center bot Y U8 0 0x0722 (1826) 0 R/W Line name Right side bot Y U8

High-precision Digital Pressure Switch

0x071F 0 R/W Line name 4th letter U8 0 Y 1824 0x0720 0 R/W Line name Left side bot U8 0 Y 1825 0x0721 0 R/W Line name Centre bot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 1826 0x0722 0 R/W Line name Right side bot U8 0 Y drE (Selection of display value resolution) 0: Normal resolution 1: Lower resolution (1/10) Setting of display value resolution 1110 0x0456 0 R/W U8 0 Y 1140 0x0474 0 R/W Cut

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

0.55

, 3(R) port 1/8 1/2 5(R), 3(R) port 5/3(R) port 1/4 1/8 1(P) port 3/8 5(EA), 3(EB) port M5 x 0.8 1(P) port 5(R), 3(R) port 3/8 1/8 EXH Common EXH Individual EXH Common EXH Common EXH Common EXH port type VF3;30 VF3;33 VF5;20 VF5;23 VF1;30 VF1;33 Applicable valve model Applicable 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations stations Manifold base W = 29n + 21 W = 51n

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

PSxx-OMV0003CN

(2 ) 2o1Lv(OUT1 ) 3o2Lv(OUT2 ) 4LinE() 5oFF() 1100 0x044C 0 R/W U8 0 Y std 1101 0x044D 0 R/W Std U8 0 Y 2 1102 0x044E 0 R/W U8 0 Y 2 2 1103 0x044F 0 R/W U8 1 Y Line 1820 0x071C 0 R/W Line 1 U8 0 Y 1 (11seg) 1821 0x071D 0 R/W Line 2 U8 0 Y Line 24 (7seg) 1822 0x071E 0 R/W Line 3 U8 0 Y 1823 0x071F 0 R/W Line 4 U8 0 Y 1824 0x0720 0 R/W Line bot U8 0 Y 1825 0x0721 0 R/W Line