IDX-OM-Z004

Y Y ,, IDF100F150F-W 6 7 IDX-OM-Z004 6 6.6 () (1) ADH-E400 V 1 -(2) 1 1 ) 1 2 ) Y92S-36/CR2477/ () 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDF100F150F-W 6 8 IDX-OM-Z004 7 7 7.1 / 7-1 IDF100150F-W 7 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel

IDX-OM-W035

P EDV PC EDV PE T V IDFB Series 6-4 6-3 IDX-OM-W035 6 6-5 (IDFB55E,75E) (IDFB22E,37E) ,, IDFB Series 6-5 6-4 IDX-OM-W035 7 K 7 K 7-1 ( ) 7-2 240psi (1.6MPa) AD48N-8Z-A-X2112 (N) AD48-8-A-X2112 () KQ2H11-35AS (N) KQ2H10-02AS () 3/8 (N) 10 () IDFB22E/37E--K N.

AS-FPQ/AS-FPG

Metric sizes 6 8 10 12 Flow rate l/min (ANR) Controlled 100 180 230 260 390 460 660 790 920 1580 1710 (free) flow Effective area mm 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are at a pressure of 0.5MPa, and temperature of 20C.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

Compact Manometer Series PPA 1

Press and hold the POWER and LIGHT buttons for 6 seconds or more. MPa POWER LIGHT MPa POWER LIGHT 14-12-6 7 Compact Manometer Series PPA Dimensions Connecting tube port 40 20 Accessory One-touch fitting F.R.L.

Compact Manometer Series PPA 1

Press and hold the POWER and LIGHT buttons for 6 seconds or more. MPa POWER LIGHT MPa POWER LIGHT 14-12-6 7 Compact Manometer Series PPA Dimensions Connecting tube port 40 20 Accessory One-touch fitting F.R.L.

70pvvna

100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil A B Non-locking push type Non-locking extended type Locking slotted type 1 2 3 4 5 6 7 9 1 2 3 4 5 6 7 9 Electrical entry Grommet Conduit Conduit terminal DIN terminal DIN terminal with indicator light Option G C T Note) D DL Option Option Option Note) When the electrical entry

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

STAINLESS STEEL CYLINDER

Table 1 Tightening torque ( Unit: Nm ) Foot Flange Plug bolt Cushion valve Cushion valve (Lock nut) Bore size (mm) (Valve retainer) 20 1.5 2.0 0.5 25 2.9 2.0 0.5 32 2.9 2.0 0.5 40 4.9 2.0 0.5 50 11.8 5.0 1.0 63 24.5 5.0 1.0 80 24.5 20.0 2.0 100 42.2 20.0 2.0 6.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500

EXxx-OMN0027CN

0 0 1 Bit No. 05 09h(9 ) 6 (1) 7 (0) 07 7 6 5 4 3 2 1 0 Byte 20 Bit No. 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 89 7 6 5 4 3 2 1 0 Byte 21 Bit No. 0 18 1 19 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved -75No.EX-OMN0027CN-D 3 12 1 7 6 5 4 3 2 1 0 Byte28 1 0 A Byte29 A Byte30 A 7 6 5 4 3 2 1 0 Byte61 1 0 L Byte62 L Byte63 L Bit No. 04 09 5 Reserved 6 (

Electric Actuators

Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw

Series CQ2

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Micro Mist Separator with Prefilter Series AMH Membrane Air Dryer Series IDG 0.01 m Some oil odor to 1, 6, 1 Pressure dew point 10C Aftercooler (Water cooled) Series HAW Refrigerated Air Dryer Series IDF No.7 No.7 + + Series AMH Series IDG Series AME Stirring, transporting, drying and packaging For clean room (equivalent up to Class 100, depending on condition.)

VG342

DIN terminal Terminal 1 2 + + Pilot Valve Assembly Specifications Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) Electrical entry How to Change Passage State Enclosure Dusttight Lead wire color 100 VAC: Blue, 200 VAC: Red, 24 VDC: Red/Black AC (50/60 Hz) 100, 200, 24, 48, 110, 220, 240 Coil rated voltage (V) 24, 6, 12, 48, 100 DC Allowable voltage fluctuation

Pressure switch for energy-saving control ejector with N.O. type valve

HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not to a level within the set pressure range.

Plate Cylinder with Lock Series MLU

5.5 5.5 6 7 14 14 15 18 14 15.5 16 21.5 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 4.3 5.1 6.9 8.7 6 6.5 8 10 30 35.5 37.5 44 19 22 22.5 28 3.5 3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36 42 M5 x 0.8 90 100 104 124.5 126 140 149 177.5 104 114 119 142.5 8 6.5 9 12 MLUB25 MLUB32 MLUB40 MLUB50 M8 x 1.25 depth 13 Rc, NPT, 1/8 M8 x 1.25 depth 13

I

1.5 110 30 12 4 0.5 220 20 10 2 0.25 440 15 6 550 10 5 Insulation resistance 100 m.Ohm min at 500V DC Test voltage AC 2000V for i minute D I M E N S I O N S P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S ISG S A F E T Y Do not set differential below the minimum specified.

Miniature Guide Rod Cylinder Series MGJ

Operation outside of this range may cause excessive impact, which may result in the damage to the devices. 6 10 Bore size (mm) 6 Operating piston speed (m/s) 0.05 to 0.5 L Allowable kinetic energy (J) 0.012 0.035 100 5st 10st 15st W 100 80 Load weight W (g) 10 10 60 6 Load weight (kg) L 40 1 W 20 0.1 00 5 10 15 20 0.01 0.01 1.0 0.1 Eccentric distance L (mm) Maximum speed (m/s) 10 300 5st