Safety Speed Control Valve (SSC Valve) Series ASS 1

ASN AQ ASV AK ASS ASR ASF 15-15-5

3 Port Solenoid Valve/

) 15 A Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 2 x 5.2 (For mounting) 2 x 3/8" [3(R) port] G12 5 47 (M12 connector) Applicable cable O.D. (3.5 to 7) 62.5 33.5 109 125 96 62.5 35 (90.4) (Variable throttle type) Vent port (6.4) 15.5 15 8 (14) 201.8 (Max. 10) 93.8 24.2 56.2 101.3 75.5 View A For M12 connector 30.5 24.2 (15)

0.01

E E E E L S L L L S S S S L L L L L 6 9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number

LFE-OMY0008

X1.2 9 ( ) 24V10% 63 No.LFE*-OMY0008 LFE1 LFE2 LFE3 1 1 1 5S/cm () 10 0.520 L/min 2.5100 L/min 5200 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 2 0.4 L/min 2.0 L/min 4 L/min 0.1 L/min 0.5 L/min 1 L/min (50 ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse 3 085 () L/minL 2F.S. 21.5F.S. 5F.S.(25) 5F.S.(25) 3 01 MPa 3 2 MPa 4 9.9 L 9 L 0.1L 1L

Digital Flow Switch Series PFA For Air Series PFW For Water

min or l).]

Fluoropolymer Tubing Variations

g piece of fluororesin tubing is cut off, washed in DI water (puer water) and immersed in 15 mL of 25% methyl alcohol extract at room temperature for 24 hours.

Antistatic One-touch Fittings Series KA

M P D L A Part No.

RHC

17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 25 25 29.5 30 27 74.5 64.5 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 REC 32 32 33 33.5 30.5 78 68 15 19.5 12 18 10.5 21.5 14 16.5 9 8.5 22.5 16 40 40 37.5 38 35 82.5 72.5 20 24.5 17 23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85 18 28.5 15 23.5 13.5 27

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

JXCx-OMT0032CN

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

VP300/500/700

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

or less VQ1130 Metal seal 3 position 2 position Single VQ1 30 Side 1 to 16 stations Options: 6.3 (0.35) 15 or less 20 or less VQ1131 Rubber seal VQ1000 VV5Q13VQ1 31 424 57 Built-in silencer Direct exhaust 4.5 (0.25) 12 or less 15 or less VQ1230 Metal seal Double (latching) 6.3 (0.35) 15 or less 20 or less VQ1231 Rubber seal Valve specifications Electrical specifications VQ1000 4.5 (0.25)

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Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series.

Air Cylinder CLA Series Fine Lock Model

DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock. O For the D-As'model (with indicator lamp), if used at less than the operating current range, LED will not tum on, but switch will operaie properly. a Never use load exceeding maximum conlact capacity of switch.

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DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock. O For the D-As'model (with indicator lamp), if used at less than the operating current range, LED will not tum on, but switch will operaie properly. a Never use load exceeding maximum conlact capacity of switch.

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

RZQ

24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 50 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

How to Order M ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.