SV

U side D side POWERRUNSD RD ERR Name of terminal block, LED Note Cable wiring ADDRESS NO.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

For R and U, only DC voltage is available.

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.

Table of Contents

side, side port) End plate assembly (U side, side port) Aluminum Aluminum y y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve r.

Table of Contents

7 u !6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U U U U U U U U U 12 19.5 20.5 26.5 23 26 22 16 22.5 23.5 29.5 26 29 25 20 24.5 25.5 31.5 28 31 27 25 27.5 28.5 34.5 31 34 30 32 26.5 31.5 32.5 38.5 35 38 34 27 29 40 30 44 35 36 42 38.5 41.5 37.5 30.5 32.5 50 36 50 41 42 48 44.5 47.5 43.5 36.5 38.5 63 39.5 56.5 47.5 48.5 54.5 51 54 50 40 42 80 49.5 66.5 57.5 58.5 64.5 61 64 60 50 52 100 59.5 76.5 67.5 68.5 74.5 71 74 70

Vacuum Pad

-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Electric Actuator/Slider Type

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

High Vacuum Angle Valve

U type: DC only.

V100

For R and U, DC voltage is only available.

7

C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5) U 168 (176

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

I

T P U T F U N C T I O N Courtesy of Steven Engineering, Inc. !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Table of Contents

u u Drain Drain Drain Component Parts Material No.

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)

Modular F.R.L. Units

industries u u Alcohol Ethyl alcohol IPA Methyl alcohol Antifreeze Adhesives u Oil Gasoline Kerosene u Ester Phthalic acid dimethyl Phthalic acid diethyl Acetic acid Synthetic oil Anti-rust additives u Ether Methyl ether Ethyl ether Brake oil additives u Amino Methyl amino Cutting oil Brake oil additives Rubber accelerator u u Others Thread-lock fluid Seawater Leak tester u : Essentially

0.4

VVQ2000-3A-1<U-Side End Plate Assembly> y U-side end plate assembly no.