SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

ML1

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

Sine Rodless Cylinder Series REA

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

3 Port Solenoid Valve Series SYJ300/500/700

valves there is no S option.

Series HAW Water Cooled Aftercooler 1

130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8

Hydraulic Filters

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model Flange port size Note) Rated flow rate (L/min) Model/Rated Flow Rate FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA-24 FHIA-28 FHIA-32 1/2B 30 3/4B 50 1B 95 1 1/4B 150 1 1/2B 220 2B 350 2 1/2B 550 3B 770 3 1/2B 1000 4B 1300 The symbol represented by indicates the type of applicable hydraulic fluid.

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Parallel Opening/Closing Type Gripper, XRAY Series

Aleignt should be ued. @ 690 kPa llOO p6i): 45ON tlOolbl with x-ht-2:1 optbn: gooN (2mtb) -5o: somm 11.97"1 Sr6ke 150: 150mm {5.905"1 Weiqhl -50: 4.6k9 ilo 2b) Weight 150: 5.2k9 111.3bl Max Presure: 1,7OOkP8 (25O psD 1 6 N E M d t h v e s E A D p | . d F i a .150N ( l00lbs xRAY-450-50 XRAY-450-50-POB i50N (l(l0lbst xRAY-450150 450N ( lOOlbs xRAY-450150-POB XRAY-450-50 Weld Spatter Covers

AY Series

Aleignt should be ued. @ 690 kPa llOO p6i): 45ON tlOolbl with x-ht-2:1 optbn: gooN (2mtb) -5o: somm 11.97"1 Sr6ke 150: 150mm {5.905"1 Weiqhl -50: 4.6k9 ilo 2b) Weight 150: 5.2k9 111.3bl Max Presure: 1,7OOkP8 (25O psD 1 6 N E M d t h v e s E A D p | . d F i a .150N ( l00lbs xRAY-450-50 XRAY-450-50-POB i50N (l(l0lbst xRAY-450150 450N ( lOOlbs xRAY-450150-POB XRAY-450-50 Weld Spatter Covers

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

For AC voltage valves there is no S option. It is already built-in to the rectifier circuit. With light/surge voltage suppressor (Non-polar type) For AC voltage valves there is no S option. It is already builtin to the rectifier circuit. For type R and U, DC voltage is only available. Power saving circuit is only available in the "Z" type.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

R Port M5 0.8 R Port M5 0.8 S 20 20 stations A, B Port M3 0.5 P Port P Port M5 0.8 A, B Port M3 0.5 Applicable solenoid valve: SYJ3 30SYJ3 33M5 0.8 Type 32(4 Port / Base mounted type) Applicable blank plate ass'y: SYJ3000-21-2A SS5YJ3-32-05 --M5T Type 32 Type S32 ( ) Single solenoid coil is located on same side as the A, B port.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Support Guide, ELECTRIC ACTUATOR, 3.96 lb

SUPPORT GUIDE, ACTUATOR, ELECTRIC ACTUATOR, LC, 32MM LE ELECTRIC ACTUATOR, 8.26733 lb

Support Guide, ELECTRIC ACTUATOR, 0.92 lb

Support Guide, ELECTRIC ACTUATOR, 3.16 lb

SUPPORT GUIDE, ACTUATOR, ELECTRIC ACTUATOR, LC, 32MM LE ELECTRIC ACTUATOR, 6.33828 lb

SUPPORT GUIDE, ACTUATOR, ELECTRIC ACTUATOR, LC, 32MM LE ELECTRIC ACTUATOR, 6.33828 lb

Support Guide, ELECTRIC ACTUATOR, 2.2 lb