Compact Cylinder with Solenoid Valve/

Applicable bore size (mm) Model Port size Weight (g) Effective area (mm2) 32, 40 17 ASN2-M5 M5 x 0.8 5 1.8 50, 63 ASN2-01 1/8 3.6 4 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Construction e r !1 !5 !9 !7 !2 !8 !4 !6 w !3 q Manual button u 50, 63 !0 t i y o Length of plug connector lead wire Description No.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.

Compact Vacuum Ejector Series ZQ

Refer to How to Order ZQ1R-1-BSB-AS ZQ1L-1-BSB-AS 1 1 End block R 2 End block L 3 ZQ13M-Note) Ejector assembly 4 ZQ-3-005 ZQ-3-009 Ejector body gasket for manifold 5 Exhaust block gasket 6 Note) Refer to page 2 for detailed description of How to Order. How to Order Hexagon Socket Head Cap Screw Working procedure Disassembly Loosen and remove the hexagon socket head cap bolts q.

Speed Controller with

Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective

Support Guide/11-LEFG Series

LEY -X5 10 10 11LEFS 11LEFS Suction flow rate: 30 L/min Suction flow rate: 30 L/min 11LEJS 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5 upper limit

Clean Gas Filter

pressure 0.1 0.3 MPa 2 x Rc 1/4, NPT 1/4 HAA HAW 0.1 MPa Max. flow rate line B Pressure drop MPa AT IN 0.01 IDF IDU 0.7 MPa 0.5 MPa IDF FS A 0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

asilltr

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

Air Cylinder NCQ7 Series Compact Cylinder

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

Compact Guide Cylinder

R T XA H VA VB 3 U X PW 6 Section XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K b a PA + Stroke E FB FA e c d A + Stroke B + Stroke C + Stroke T-slot dimensions [mm] [mm] Bore size [mm] a b c d e Bore size [mm] f f 12 3.3 5.8 2.6 1.6 4.8 16 3.7 6.2 3 2.5 6.5 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 12 7 16 2.5 20 8.5 25 6 50 mm stroke or less Top-ported

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1U (PVDF, 1/4-28UNF), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1U (PVDF, 1/4-28UNF), Option: 3 (Bracket + Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1U (PVDF, 1/4-28UNF), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1U (PVDF, 1/4-28UNF), Option: 3 (Bracket + Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)