Information

3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

34 18.5 12.6 9.2 35 4.5 7.5 29h9 29.5h9 14H9 5.3 2.5 4.2 10 3.3 6 3.5 2.2 5.3 4 M5 x 0.8 M4 x 0.7 3 5.5 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 7.5 4.5 2.5 6 4 M5 x 0.8 M5 x 0.8 7 5.5 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 2.5 6 5 (mm) JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x

Free-Mounting Cylinder with Air Cushion Series CU

4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

Multistage Ejector Series ZL112/212 1

6 !5 ZP ZCU AMJ Misc. !3 !2 Description Part no. Part no. Note Comonent Parts Replacement Parts Description Material Sound absorbing material B No. No. PVF Suction cover q o ZL112-SP01 Sound absorbing material A Without valve PVF Front cover w !0 (Set no. for 9, 10 & 11) Suction filter PE End cover e !

,,: ,.

/t08 c/6 3/8 718-14 7ls t.79 .408 5/8 1t2 718-14 7t8 1.98 .501 Tube To Male Pipe: 90' ELBOW 1i8 1ts 3/16 1t8 3/16 'v4 Consult factory for iniormation 114 1t8 114 114 114 3/8 1t4 1t2 vl6 1/8 112-20 .90 .220 5/16 114 1t2-20 qt .vc .220 5/16 318 1t2-20 .98 1 .01 .219 5/16 'v2 Consult iactory lor iniormation 3i/S 1/8 5/8-18 1.01 .220 3/8 1t4 5/8-18 1.01 1.O5 .283 3/8 3lS y8-18 1.O4 1.07 .28'l

Speed Controller with One-touch Fittings

Note 3) Brass parts are all electroless nickel plated. Flow Rate and Sonic conductance AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 0.28 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 8 1/4" 5/16" 460 1.3 6 10, 12 8 6 6 10 2 Flow Direction Symbol on Body Tube O.D.

Booster Regulator Series VBA1110 to 4200 1

Q [l/min(ANR)] = x D2 x W x (P2 + 0.101) x 60 x C 6 4 x 10 0. 101 VBAT10, VBAT20, VBAT38 Q [l/min(ANR)] = x 1002 x 200 x (0.8 + 0.101) x 60 x 1 = 841 4 x 106 0. 101 Select booster regulator size from flow characteristics table. Refer to page 14-9-3 for flow characteristics.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

90

Note 3) See pressure unit table below.

2 Phase Stepper Motor/Without Motor Brake Series LXP

AC servomotor A Motor type 6 6 pcs. Auto switch type Note 2) Ball screw B Lead screw type Model Wiring/ Output type Lead wire length (m) Contact Symbol Lead screw lead Without auto switch Nil F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL 0.5 0.5 0.5 0.5 0.5 3 3 3 3 3 N.O. (A contact) N.O.

Drain Separator for Vacuum Series AMJ 1

NPT ZQ 06 3/4 10 1 ZF ZP Nil 2 6 J R Option/Combinations Combination available Combination not available ZCU Option Symbol Drain cock Nil AMJ Metal bow 2 Nylon bowl Misc. 6 Drain guide J Flow: Right Left R Model Model AMJ5000 AMJ4000 AMJ3000 Recommended flow rate (l/min(ANR)) 500 300 200 Port size (Nominal size B) 3/4, 1 3/8, 1/2 1/4, 3/8 Weight (kg) 1.1 0.6 0.3 Specifications Fluid Air

CG5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

VQ5000

(Stations 3 and 4) VQ5300-5 1 set Valve part no. (Station 5) 1 2 3 4 5 6 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check Manual override Prefix the asterisk to the part nos. of the solenoid valve, etc.

Table of Contents

Double acting 10 Single acting, Spring return 7-2-2 7-2-3 3 Mini-free Mount Cylinder Series CUJ 4, 6, 8, 10 How to Order Bore size 4 6 8 10 4 mm 6 mm 8 mm 10 mm 10 6 D CUJ B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without auto switch D 10 CDUJ B 6 F8N S With

Series AP3500

It is illustrated with an arrow pointing away from the valve body or a "filled" triangle on the schematic. f INLET E OUTLET Mounting hole Outlet (Downstream) Bottom port (Upstream) Inlet (Upstream) Porting Symbols Top view (Mounting hole on bottom) 2PW 2PWA 2PWB 2PWC q q q w 2 Ports 3 Ports 4 Ports q w w w 3PWD 3PWE 3PWG 3PWH 3PWF 3PWJ q q q q q q e e e e e e w w w w w w 4PWK 4PWL 4PWM 4PWN

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

0 @0 @1 @2 @3 r !6 !1 q y e t !7 !3 w !9 i u 125 80 to 125 (No flat washer for 125) 80 to 125 !5 !4 i o Replacement Parts/Seal Kit (Single rod) Component Parts Bore size (mm) Kit no. Contents No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.