MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

PF2D

4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.

Compact Cylinder with Solenoid Valve/

6 w !3 q Manual button u 50, 63 !0 t i y o Length of plug connector lead wire Description No. Material Component Parts The standard length of the plug connector with a lead wire is 300 mm, but other lengths are available as follows.

CG1

3 !4 !5 !6 !7 !8 !

Air Cylinder RSQ Series Stopper Cylinder

Jor ed switches and 1mm me. lor $lid state switches. 3 wile system NPN The .onianioi ndtud ras lih lh6 4pul lpelcaliois cl i ConlactsMo r hysreresls saproblem. r-pur i rr'r , e eq.pn ao ioto.-'tllec. /--:-,'"1-t i ,/+.'' Gr ^.1-r : leoi-eamo.,bPa @3-i*6-ni dri+*d-n er"''"" \ i I T-f | \ R".r | | l 'tsY ";;fl-rtffi.:.i '*.mff .

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Residual Pressure Release Valve

fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06 KEB08 KEB10 KEB12 12.8 15.2 18.5 20.9 25 27 27.7 29 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 13 17 24 31 With One-touch fitting with a push

CLQ

Take special care to avoid reverse wiring of the brown [red] power supply line and the black [white] output line on 3 wire type switches. 6. Avoid incorrect wiring. A 24VDC switch with indicator light has polarity.

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Counter/Extension Cable

When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 RS-232C 1 2 3 4 5 6 7 8 9 10 Output terminal This is the interface standard for the serial transmission method, which is standard equipment

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.) Note 2) Brass parts are all electroless nickel plated.

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

Support Guide/11-LEFG Series

3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions

Clean Gas Filter

SF SF <3/8"> Piping O.D. 3/8" = 9.53 mm Stainless steel tube Nut Swagelok fittings by Swagelok Company VCR female nut (SS-8-VCR-1) Gland Swagelok fittings by Swagelok Company VCR gland (SS-6-VCR-3) Gasket Swagelok fittings by Swagelok Company VCR gasket retainer assembly (SS-8-VCR-2-GR) SFD LLB AD GD Be sure to conduct a helium leak test before using similar fittings from other companies

asilltr

t 0s6 (%6') lele 2% 075 (%\ l ela 2/a 106 (1I6',1 131 216 -, Bore Stroke t 150 \1y2\ 13/4 2% 20o (2\ 11%6 2%a 106 (1'16') lia l=0.52 150 {1%") 114 l=0.5 250l2%\ 23la 3146 300 (3) 2% 3% 400 (4'l 2sla 3?/16 NOTE 1) Female threacl length ("1") is shoner for iie above listed strokes.

Compact Guide Cylinder

R T XA H VA VB 3 U X PW 6 Section XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K b a PA + Stroke E FB FA e c d A + Stroke B + Stroke C + Stroke T-slot dimensions [mm] [mm] Bore size [mm] a b c d e Bore size [mm] f f 12 3.3 5.8 2.6 1.6 4.8 16 3.7 6.2 3 2.5 6.5 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 12 7 16 2.5 20 8.5 25 6 50 mm stroke or less Top-ported

Air Cylinder NCQ7 Series Compact Cylinder

t 0s6 (%6') lele 2% 075 (%\ l ela 2/a 106 (1I6',1 131 216 -, Bore Stroke t 150 \1y2\ 13/4 2% 20o (2\ 11%6 2%a 106 (1'16') lia l=0.52 150 {1%") 114 l=0.5 250l2%\ 23la 3146 300 (3) 2% 3% 400 (4'l 2sla 3?/16 NOTE 1) Female threacl length ("1") is shoner for iie above listed strokes.

CU

4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

Speed Controller with

Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective