SL5200

40 0.24 35 4 Delivery pressure (MPa) Delivery pressure (psig) 1.0 (25.4) 0.21 30 5 0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21

VQC

Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000

Compact

ST 45, 50 ST 35, 40 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 ST 25, 30 0.30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 25, 30 0.20 0.10 0.10 0.15 ST 15, 20 0.10 0.05 0.05 ST 5, 10 0.05 ST 5, 10ST 15, 20 ST 5, 10 ST 15, 20 0.00 0 20 40 60 0.00 0 20 40 60 0.00 0 20 40 60 Load [N] Load [N] Load [N] ST = Stroke 14 MXZ Series

Coolant Valve

/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 7 Valve size 1 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

26.9 22.9 6 11.6 36.3 24.9 22 AS231F-01-08ST AS231F-N01-05ST 7 16.5 NPT1/8 12.7 14 1.5 3/16" 11.4 14 26.8 31.6 18.5 12.9 30.9 10.9 23.9 16.2 28.2 8 15.2 25 40.8 37.3 34.7 AS231F-02-04ST AS231F-N01-07ST 1/4" 13.2 25.6 17 16 16.2 30.6 21.9 4 10.4 10.9 40 39.6 23 38.2 29.9 12.9 16.2 AS231F-02-06ST AS231F-N01-09ST 18.5 5/16" 30.9 28.2 15.2 17 18.4 34 25.2 6 12.8 41 42.1 25 40.8 7 18.5 1.5 34.7

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

(E) Position number 1 (End side) 2 (Motor side) 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) 50 Series LECP2 Signal Timing (1) Positioning Operation [Driving to the stroke end] (4) Stop by the STOP Signal 24 V 0 V 24 V 0 V Power supply Power supply ON OFF ON OFF IN0 or 1 IN0-3 Input Input ON OFF OUT0 or 1 STOP Output ON OFF BUSY OUT0-3 Release Hold BUSY External lock Output ALARM Speed

125

/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz)[115 VAC (50/60 Hz)] 4 220 VAC (50/60 Hz)[230 VAC (50/60 Hz)] 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * There is no S option for AC, since a rectifier prevents surge voltage generation.

F/ISE

"P_3" or "n_3" and the set point value light up alternately. 14 Series ZSE F/ISE 50 60 50 60 Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Auto preset (Example: Adsorption Confirmation) 1. Auto preset mode 2. Preparation of auto preset 3. OUT1 auto preset SET Press the SET button. Repeat vacuum and break several times while "AIL" is displayed.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

N.O. 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Note) N.O. valve operates properly only when appropriate pressure is applied to the pilot.

EXxx-OMU0020CN

SI 1 x 2 x ( 2.5mm = 1.3 Nm) . 3-3 IP65 14 No.EX-OMU0020CN 3.2.

PSxx-OML0002CN

No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

Electromagnetic Digital Flow Switch

to 600 Accumulated pulse output wiring examples NPN 2 output type LFElAlll NPN + Analog output type LFElClll/LFElDlll Max. 28 V, 80 mA Black OUT1 Load White OUT2 (LFE A only) Load 0 V or Blue DC () 50 ms 50 ms PNP 2 output type LFElBlll Brown DC (+) Black OUT1 Max. 80 mA Load White OUT2 0 V or Load 50 ms 50 ms * When accumulated pulse output is selected, the indicator light is turned off

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Contact P/A regarding other voltages.

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

Micro-Mist Separator with Prefilter Series AMH

7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225 AMH450 232 1 AMH550 3/4 1 259 AMH650 1 1 1/2 311 5 SeriesAMH (mm) Accessory AMH850 0: With auto drain (N.O. type) For AMH850 a: 3/88 female thread Optional Specification LL 0 T: With

PFxx-OMO0004CN

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

Series VCL

to 140F) (with no freezing) 10 to 100C (14 to 212F) Fluid temperature Splash-proof (equivalent to IP65) Enclosure Location without corrosive or explosive gases Environment 0 (with oil pressure) Valve leakage cm3/min Unrestricted Mounting position 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) 100VAC, 200VAC, 220VAC, 230VAC (50/60Hz) Rated voltage 10% of rated voltage Allowable

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZS-20-5A-50 . 1 pc.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

Standard stroke (mm) 10, 20, 30, 40, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75 Bore size (mm) Nil S 6 10 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 15, 20, 25, 32 Auto switch type Nil Without auto switch (built-in magnet) Note) Refer to the table below for auto switch part numbers. Applicable auto switches Load voltage Auto switch part no.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

"P_3" or "n_3" and the set point value light up alternately. 14 Series ZSE F/ISE 50 60 50 60 Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Auto preset (Example: Adsorption Confirmation) 1. Auto preset mode 2. Preparation of auto preset 3. OUT1 auto preset SET Press the SET button. Repeat vacuum and break several times while "AIL" is displayed.