CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder CJ2-Z Series 10, 16 Air Cylinder 10-/1121-/22RoHS How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Rubber bumper (Standard) Air cushion Nil A 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location 2 pcs. 1 pc. n pcs.
D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.
0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.
One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.
A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.
With ons cap typ shockabsorber r"L' is added io the ehd whn the tead wire is 3m tong. Exanll) A73LO-A73L Hosv6r,3m is applid to D-FTNTLand D-F7BAL bv (Pleas consull SMC in case or5m lenglh.)
[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation
With ons cap typ shockabsorber r"L' is added io the ehd whn the tead wire is 3m tong. Exanll) A73LO-A73L Hosv6r,3m is applid to D-FTNTLand D-F7BAL bv (Pleas consull SMC in case or5m lenglh.)
2.11-21 D-J79C MHR Grommet 2.11-22 D-F59/F5P/J51/J59 MHK 2.11-23 D-S991/S992/D-S99V1/S99V2 Solid state switch 2.11-23 D-T991/T992/D-T99V1/T99V2 MHS 2.11-23 D-S9P1/S9P2/D-S9PV1/S9PV2 Grommet 2.11-24 D-S791/S792 2.11-24 D-T791/T792 Direct mounting 2.11-24 D-S7P1/S7P2 MHC2 Connector 2.11-24 D-T791C/T792C MHT2 D-F9N/F9P/F9B D-F9NV/F9PV/F9BV D-Y59A/Y59B/Y7P D-Y69A/Y69B/Y7PV 2.11-25 Grommet MHY2
o Linseed Oil o o D a tr o o Lubricating Oil tr o tr tr o o o Machine Oil tr B D D D tr D D Methyl Alcohol D o o o o I I Methyl Ellryl Ketone o o o I o o Mineral Oil o D o tr tr tr o Motor Oil o o tr n o Naphtha o o o Nitrate 10oi0 I I I I I V V Ozone o o o o I V V Ozon Low Concenlration o tr o o Petroleum o o o o o tr Petroleum Oils a o tr o o D Soapy Water EI B o o o o B tr Sodium Chloride
-R Available combination D Combination not available 2 SeriesAR Pressure Characteristics Flow Characteristics Setting Regulator .When orange color mark appears under adjusting handle, it will rotale.
IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
A G Dimension table G 1/8 1/4 F 12 14 E 4 6 D 10 12 C 23.8 24.5 B 40.8 44.5 A 37 42 Model G3601 G4602 Specifications G3601 R 1/8 G4602 R 1/4 270 Rolled steel plate (black melamine coated) Polycarbonate Brass 55g 80g Model Piping port size Scale angle Case Installing the Cover After setting the indicator needles, return the cover to its original position by aligning the indentation at the
E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5
VBA VBAT Cylinder Thrust Control Tension control balancer 2(A) 3(R) AP100 Air Flow Control of Nozzle Note) Example Auto balancer 1(P) Air blowing Air cooling 2(A) 3(R) 1(P) Automatic adjustments Pressure Control of Tank 3(R) 3(R) Flow Control of Various Fluids 2(A) 2(A) 1(P) 1(P) For remote control of another air operated valve Nozzle 3(R) 2(A) Note) Use for the sonic flow. 3(R) 1(P) 2(A)
19 7 JCQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV U A B [mm] Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto
ITV How to Order Flow Characteristics VBA 12 AF 00 8 127 R VE Option VY Pressure drop (MPa) Pressure drop (MPa) Air filter Drain cock for thread piping {Rc(PT) } Drain guide Flow: From right to left D 14 G Jl4 Body size R 1 2 1 2 8 9 AL Option 2 11 Optional filtration rate Metal bowl Nylon bowl Stainless steel element Metal bowl with level gauge (AFD3000/AFD4000 only) Without drain cock Flow