Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-89 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Bottom, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: J (Port Location Both Sides, External Pilot), A,B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/

Model: 10S6 (Side Ported), SI Unit Specification: WS (Wireless Remote Unit), SI Unit Output Polarity, End Plate: 2 (SI Unit Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Block: J (B Side, 2 to 24 Stations, External Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch), Mounting: D (DIN Rail Mounting w/o Name Plate),

Model: 10S6 (Side Ported), SI Unit Specification: WS (Wireless Remote Unit), SI Unit Output Polarity, End Plate: 5 (SI Unit Negative Common, 7/8" Connector), I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Block: B (Both Sides, 2 to 24 Stations, Internal Pilot), A,B Port Size: C8 (ø8 One-touch Fitting, Straight, Metric)

Model: 10S6 (Side Ported), SI Unit Specification: WS (Wireless Remote Unit), SI Unit Output Polarity, End Plate: 5 (SI Unit Negative Common, 7/8" Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Block: F (B Side, 2 to 24 Stations, Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric)

Model: 10S6 (Side Ported), SI Unit Specification: WS (Wireless Remote Unit), SI Unit Output Polarity, End Plate: 4 (SI Unit Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Block: B (Both Sides, 2 to 24 Stations, Internal Pilot), A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric)

Model: 10S6 (Side Ported), SI Unit Specification: WS (Wireless Remote Unit), SI Unit Output Polarity, End Plate: 5 (SI Unit Negative Common, 7/8" Connector), I/O Unit Stations: None, Valve Stations: 4 Stations, P,E Port, SUP/EXH Block: B (Both Sides, 2 to 24 Stations, Internal Pilot), A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric)

Model: 10S6 (Side Ported), SI Unit Specification: WS (Wireless Remote Unit), SI Unit Output Polarity, End Plate: 4 (SI Unit Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Block: B (Both Sides, 2 to 24 Stations, Internal Pilot), A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric)

Series: SS5Y3 (SY3000 Manifold), Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: WS (Wireless Remote), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot)

Series: SS5Y3 (SY3000 Manifold), Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: WS (Wireless Remote), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: C4 (ø4 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o