Series SV

With external pilot specification (Pitch) P = 20.5 48.6 21.3 18 11 23.5 11.8 11.6 13.5 36.1 37.6 60.3 3 5 E 3 5 E 4 A 4 A 4 A 4 A 4 A 36 76.8 E 3 5 E 3 5 4 A 4 A 4 A 4 A 4 A 59.5 2 B 2 B 2 B 2 B 2 B 1 P 1 P C2 2 B 2 B 2 B 2 B 2 B 1 P C2 1 P x PE X PE C1 2-M12 C1 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 N7 One-touch fitting [PE: Pilot EXH port] Applicable tubing

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) [Communication connector D-sub] (76.8) (External pilot specifications) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

SV

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) 2-M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 SV 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 SZ 3 3 PWR 3 3 42.7 5 3 E 3 5 E 5 3 E 3 5 E T T 43 PWR 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" 1 1 1 1 BUS 4632

42

, C12, N7, N9, N11 4(A), 2(B) port 148.9 (Double) 71.7 96.2 Electrical entry from U side (FU) 139.9 (Single) 16.2 43.2 49.7 106 47 U side 11.7 9 9 1/8" External pilot port Manual override 15 27 38 n X 12 X B 2 A 4 7 B 2 A 4 A 6 SMC SMC SMC SMC A A A A A B B A A B A B A B P2: 3/8" Indicator light B 2 A 4 5 L1 L2 B 2 A 4 4 B Pressure switch (IS1000P-2) P = 25 44 B 2 A 4 3 P1: 1/8" B 2 A 4 2

0.4

VF VP4 Cylinder port SUP port EXH VQ 1/2 2, 4 (A, B) 1, 3 (P, R) VQ 4/5 VQC 1/2 VQC 1/2 25-core cable 26 pins VQC 4/5 25 pins 26 pins 20 pins IP67 compliant IP67 compliant IP67 compliant VQZ SQ VFS VFR VQ7 C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C10 (10) C4 (4) C6 (6) C8 (8) N11 (3/8") In case of branch type C12 (12) N13 (1/2") N3 (5/32") N7

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

P PF2M701/702/705/710 -C4(-L) 59.1 2.8 depth 8.4 8 PF2M701/702/705/710/ 725/750-C6(-L) 59.9 2.8 depth 8.4 8 2 x P PF2M725/750-N7(-L) 67.5 2.8 depth 8.4 PF2M711/721-C8(-L) 68 2.8 depth 6.2 PF2M711/721-N7(-L) 64.6 2.8 depth 6.2 2 x P PF2M7mL-C4/C6/C8/N7(-L) 48 A 48 A 18 18 OUT2 OUT1 OUT2 OUT1 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 38.5 C (30.9) 38.5 C (30.9) 3 3 18 OUT IN 18 68 2 x 3.4 2

SQ1000/2000

BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3:

0.4

VP4 MODEL SB RD SD VQ 1/2 VQ 1/2 VQ 4/5 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assembly (AXT100-B04A) on the unused conduit port (G1/2).

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Series VQ Metal Seal/Rubber Seal Body Ported

SYJ How to order valve SX VQ1140 5 N7 M How to order manifold VV5Q1409FS0D K S VK Cylinder ports N1 N3 N9 N7 Symbol VZ Applicable tube O.D. (Inch) 1/8 5/32 5/16 1/4 Others, option symbol in alphabetical order VF VQ0 A/B port VQ1000 VQ2000 2.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

5 Port Air Operated Valve SYA3000/5000/7000 Series

Note 2) ( ): denotes without sub-plate. 1461 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Manual override (Non-locking) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

SYA3000/5000/7000

Note 2) ( ): denotes without sub-plate. 1731 Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) VA Body ported SA Series SYJA500 VA With Bracket VM VR Air operated valve type SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not mounted.

Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 size (inch) Ports 2, 4 Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M Ports 2, 4 Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting