Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 VFA1000 VFA3000 VFA5000 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

0.4

mounting (For manifold) IN side port size OUT side port size D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F With bracket N Name plate Note) When two or more symbols are specified, indicate them alphabetically

42

R1 R2 SV n A B SYJ 7 VVQ4000 -10A-1 SZ A B VF VQ440 0 1 6 VP4 A B VQ 1/2 1. Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit. VQ430 0 1 5 VQ 4/5 VQ 4/5 A B VQC 1/2 4 VQ420 0 1 1.

Series VQ Base Mounted Metal Seal/Rubber Seal

How to Order Manifold Option VV5Q 1 08 C6 U 1 1 N P Symbol Option VQ1000 VQ2000 Remarks None Check valve for prevention of back press.

Series VQ Metal Seal/Rubber Seal Body Ported

How to Order Manifold 1 D 1 4 08 S VV5Q P Series Option Manifold 0 1 2 VQ0 VQ1000 VQ2000 D (2) DIN rail mounting Special wiring specification (Not double wiring) With name plate Built-in silencer {Direct exhaust (U side only)} 4 Plug lead unit/Flip Cable (length) (3) K Station 0 1 2 3 Without cable With cable (1.5m) With cable (3m) With cable (5m) N 01 1 station S 16 16 stations Note 1)

Serial Network

, (N)VZS, ISO N Positive IN313-DN1-B VQ1000 N NP420-DN1 32 in, 32 out Positive SEMI & Honeywell EX141-SSD1 16 out N Positive SQ1000/2000, SZ3000/5000 SDS (N)VFR/VFS, (N)VZS, ISO 16 out Negative IN313-PR1 N ?

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 0 (N.C., Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 3 (3mm), Style: 2 (N.O., Single Unit), Option: G (Stainless Steel, Seals: NBR, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: A (C37, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 2 (2.2mm), Style: 2 (N.O., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 0 (N.C., Single Unit), Option: J (Stainless Steel, Seals: EPDM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: H (Stainless Steel, Seals: FKM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: J (Stainless Steel, Seals: EPDM, Class B), Suffix: Z (Oil-free), Port Size: 01 (1/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)