MQQ

L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.

MXS Series Air Slide Table

G H 24 10.5 24 10.5 A B 10.5 10.5 5.1 9.5 26 1 6 NN-M6 X 1 thread 12 deep A B 5H9 4 deep +0.030 0 5H9 4 deep +0.030 0 Cross section AA Cross section BB HA GA (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40

C85

(mm) (mm) f g c j a Bore Model Thread d3 M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 dh7 h 27 27 30 30 36 43 d6 18 18 20 20 24 28 b3 b1 l 10 10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12

Electric Actuators

Motor side 16 pulse End side 1 A Parameter no.

Aluminum High Vacuum Angle Valve

M: Size 16, 25, 40 only.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

ISO Standard Hydraulic Cylinder

40 3/4 54 82 350 CHSG Series ISO Standed Hydraulic Cylinder 16 MPa Accessory (Option) Rod end nut 30 d CHQ CHK D C CHN H B CHM CHS CHS Material: Carbon steel Part no.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

For details, refer to page 6-16-1.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

M12 x 1.75 27 13 80 231 14 90 139 14 34 M27 x 2 35 32 125 6.5 34 80 38 140 140 112 35.5 35 27 19 16 M14 x 2 27 15 100 247 16 112 170 16 34 M27 x 2 35 32 160 9 43 100 42 174 174 140 45 38 36 22 18 M16 x 2 28 17 110 275 18 140 197 18 38 M33 x 2 40 36 (mm) Without rod boot With rod boot Bore size (mm) P l R S T V W X Y H ZZ e f h ZZ 40 1/4 37 106 11 7.5 8 27 8 66 207 55 25 92 233 50 3/8 43

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Shock absorbers for L and H units Bore size (mm) Unit type Model 25 16 40 L unit H unit L unit H unit RB0806 RB1007 RB1007 RB1412 RB1007 RB1412 RB1412 RB2015 RB1412 RB2015 RB2015 RB2725 MY2H MY2HT Drive unit (cylinder) replacement part nos.

LEC-OM07605CN

1 16.A 1 DB 16.B 2 DB 16.C 3 DB 16.D 4 DB 16.E 5 DB 16.F 6 DB 8 2 8.

42

port SMC VQC 1/2 VQC 4/5 37 41 50 98 PE X 18 31.5 VQZ 26.5 P R1 R2 16 27.5 41 41 27.5 SQ 1/8" External pilot port 1/8" PE. port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port VFS VFR 2-position double: VQ525 0 1-l G H 3-position closed center: VQ535 0 1-l G H 3-position exhaust center: VQ545 0 1-l G H 3-position pressure center: VQ5550 1-l G H 3-position double check: VQ565 0 1-l G H VQ7 194.5

Speed Controller with Indicator

Note 1) Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Indicator window direction Elbow Universal Nil 0 Indicator window Note 1) For selecting applicable tubing O.D., refer to the Model on page 16. Note 2) Use 1/8" tubing.

JXCx-OMT0061CN

16 CC-Link 001dh 1 1,2,4 * 30 - (9000)h 2 0.01mm (9002)h 1 1mm/s (9003)h 1 1% (9004)h 2 0.01mm (9006)h No. 1 (9008)h 2()/1() 1 (9009)h 4()/3() 1 JOG (0030)h JOG 1 *1 1mm/s 2 (0031)h JOG 1 1 1mm/s 2 (0032)h JOG 1 1 1mm/s (0033)h JOG 1 *1 1% (0034)h 2 (-) 0.01mm (+) (0400)h (040F)h (No.0) 16 (0410)h (041F)h (No.1) 16 (0420)h (042F)h (No.2) 16 . . . . . . . . . . . . .

MHZ

Gripping point L (mm) Gripping point L (mm) DMHZ2-40 MHZ2-16/11-MHZ2-16 200 2060 50 150 Overhang H (mm) Overhang H (mm) Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa 40 0.3 MPa 0.3 MPa 100 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.3 MPa 30 0.4 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 20 0.7 MPa 50 10 0 50 100 150 200 0 10

MHZ

Gripping point L (mm) Gripping point L (mm) DMHZ2-40 MHZ2-16/11-MHZ2-16 200 2060 50 150 Overhang H (mm) Overhang H (mm) Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa 40 0.3 MPa 0.3 MPa 100 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.3 MPa 30 0.4 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 20 0.7 MPa 50 10 0 50 100 150 200 0 10

REA/REB

HS Z + Stroke Q + Stroke A N N (mm) HP HO HI HG HB HA H GP G FB FA EB EA d D C B Model A REAL15 REAL20 REAL25 REAL32 REAL40 39 38 14 16 4 6.5 40 65 6.5 6 3 13 6 12 16.6 5 9.5 7.5 45 44 16 18 10 9 46 80 8.5 16 21.6 5 9.5 9.5 53 52 21 23 18 9 54 90 8.5 7 4 14 8 16 26.4 6.5 11 9.5 64 26.5 24.5 64 26.5 110 66 12 9.5 16 5 7 8 8 33.6 20 14 10.5 76 74 28.5 12 35 30.5 78 10 10.5 130 5 25 10 20 41.6

REA/REB

-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16

Modular F.R.L. Unit

H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.