VQC

CAT.ES11-80 A 5-Port Solenoid Valve Series VQC NEW CONCEPT Connector Type Manifold Series VQC1000/2000/4000 Outstanding response times and long life Conforming to IP67 for protection from dust and moisture (Metal seal: Single type with light and surge suppressor) VQC1100: 10ms 2ms; 200 million cycles VQC2100: 20ms 2ms; 200 million cycles VQC4100: 17ms 3ms; 100 million cycles (Based on IEC529

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

ITVH

0 25 50 75 100 Input signal [% F.S.]

MLGC

13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N

VQC

Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Stainless Steel Cylinder Series CJ5-S/Series CG5-S 10, 16 20, 25, 32, 40, 50, 63, 80, 100 For use in environments with water spray such as food processing machines Stainless Steel Cylinder Series CJ5-S/Series CG5-S Series CJ5-S/Series CG5-S Series CJ5-S/Series CG5-S 10, 16 20, 25, 32, 40, 50, 63, 80, 100 Uses grease for food processing machines that meets FDA (U.S.

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X (10, 16) (10 to 32) (12 to 25) (32 to 100) (20 to 40) Clean room compatible Series 10-/11Achieves stable low speed operation even at 0.5mm/s (1mm/s for 16 bore size or smaller) Minimum operating pressure reduced (Low friction characteristics improved) Series CQ2X now includes four brand-new large bore sizes: 50, 63, 80, and 100.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper No rubber bumper Double-side

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

no load) Current consumption NPN or PNP open collector 1 output Switch output Main circuit Main circuit Load 12 to 24 VDC Maximum load current 80 mA + Black OUT Maximum applied voltage 30 V (at NPN output) Residual voltage 1 V or less (with load current of 80 mA) Response time Anti-chattering function 1 s (0.25, 0.5, 2, 3) Blue DC () PNP open collector Short-circuit protection Yes 1% F.S

CV/MVGQ

CVM5/CVM5K MXU 20 Standard 3.5-18 Double acting 25 MXS 3.5-29 32 Nonrotating rod 40 MXQ MXF Series CVM3/CVM3K 20 Standard MXW Single acting 3.5-34 25 (Spring return) 3.5-47 32 Nonrotating rod (Spring extend) MXP 40 MG Series CV3/CV3K 40, 50 63, 80 100 MGP 3.5-52 Standard Double acting MGQ Nonrotating rod 40, 50 63 3.5-63 MGG MGC Series CVS1/CVS1K 40, 50 63, 80 100 3.5-67 Standard MGF Double

AFF

6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AM AFF2B 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253

AMH

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122

08-mbb-e

Seal kit includes a grease pack (32 to 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 31

06-cba2-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 39

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

no load) Current consumption NPN or PNP open collector 1 output Switch output Main circuit Main circuit Load 12 to 24 VDC Maximum load current 80 mA + Black OUT Maximum applied voltage 30 V (at NPN output) Residual voltage 1 V or less (with load current of 80 mA) Response time Anti-chattering function 1 s (0.25, 0.5, 2, 3) Blue DC () PNP open collector Short-circuit protection Yes 1% F.S

Free-Mounting Cylinder with Air Cushion Series CU

, 90, 100 Bore sizes (mm) 20, 25, 32 Intermediate strokes are also available upon receipt of order.

Precision Clean Regulator Series SRP

100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min

IDX-OM-U022

kg 245 270 350 1, 2 () kW 100 125 150 1(ANR)[2065%] 2[32] 3 4 5R IDFA100F150F 6 1 6.1 IDX-OM-U022 6.

Precision Clean Regulator

100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

mA NPN open collector Internal voltage drop: 1 V or less (with load current of 80 mA) (PF2D300) Maximum applied voltage: 30 V 2 outputs Environmental resistance Note 4) Output specifications Switch output PNP open collector Maximum load current: 80 mA Internal voltage drop: 1.5 V or less (with load current of 80 mA) (PF2D301) 2 outputs NPN open collector or PNP open collector (same as switch